Evaluation of nano-slot antenna for mid-infrared detectors

•The nano-slot antennas were designed for operation at approximately 60THz by using an electromagnetic simulator.•We developed fabrication process using electron beam lithography system for nano-slot antennas with a load resistor.•For evaluation of the antenna properties, we used a Fourier transform...

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Bibliographic Details
Published inInfrared physics & technology Vol. 67; pp. 21 - 24
Main Authors Horikawa, Junsei, Kawakami, Akira, Hyodo, Masaharu, Tanaka, Shukichi, Takeda, Masanori, Shimakage, Hisashi
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.11.2014
Subjects
Antenna
Antenna impedance
Antennas
Detector
FTIR
Infrared
Infrared detectors
Nanostructure
Photonics
Simulation
Spectral reflectance
Superconductivity
Antenna impedance
Detector
Infrared
FTIR
Antenna
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Summary:•The nano-slot antennas were designed for operation at approximately 60THz by using an electromagnetic simulator.•We developed fabrication process using electron beam lithography system for nano-slot antennas with a load resistor.•For evaluation of the antenna properties, we used a Fourier transform infrared spectrometer.•The impedance dependency of the antenna qualitatively agreed with the simulated results.•The effective area of the antenna was evaluated and was found to be approximately 3.5μm2 at 54THz. To improve the response performance of superconducting infrared detectors, we propose using a photonic antenna with a micro-detector in conjunction with a nano-structure. In this paper, we report evaluation results that show the basic characteristics of a photonic antenna in the mid-infrared region. The antenna consists of a nano-slot antenna and a thin-film load resistance placed in the center of the antenna. The antennas were designed for operation at approximately several tens of THz by using an electromagnetic simulator. Through measurements of the spectral reflectance characteristics, clear absorptions caused by the antenna properties were observed at approximately 50THz, and high polarization dependencies were also observed. The results of the simulation qualitatively agreed with the results of the experiment. The effective area of the antenna was also evaluated and was found to be approximately 3.5μm2 at 54THz.
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ISSN:1350-4495
1879-0275
DOI:10.1016/j.infrared.2014.07.001