Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures

A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example...

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Bibliographic Details
Published inMicroscopy research and technique Vol. 26; no. 2; p. 157
Main Authors Chen, Y P, Reed, J D, O'Keefe, S S, Schaff, W J, Eastman, L F
Format Journal Article
LanguageEnglish
Published United States 01.10.1993
Subjects
Gold
Microscopy, Electron - methods
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Summary:A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example of applying this technique to an InGaAs/GaAs QWR structure is demonstrated. This technique can also be applied to any other small dimensional structures or devices with specific regions of interest.
ISSN:1059-910X
DOI:10.1002/jemt.1070260208