A solution to the charging problems in capacitive micromachined ultrasonic transducers

We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process base...

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Bibliographic Details
Published inIEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 52; no. 4; pp. 578 - 580
Main Authors Yongli Huang, Haeggstrom, E.O., Xuefeng Zhuang, Ergun, A.S., Khuri-Yakub, B.T.
Format Journal Article
LanguageEnglish
Published New York, NY IEEE 01.04.2005
Institute of Electrical and Electronics Engineers
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Acoustics
Biomembranes
Capacitance
Charging
Commercialization
Devices
Dielectrics
Electrodes
Electrostatics
Exact sciences and technology
Fabrication
Ferroelectric materials
Fundamental areas of phenomenology (including applications)
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Micromachining
Micromechanics
Physics
Shape
Testing
Transducers
Transduction; acoustical devices for the generation and reproduction of sound
Ultrasonic tests
Ultrasonic transducers
Ultrasonics, quantum acoustics, and physical effects of sound
Wafer bonding
On line
Acoustic measurement
Capacitive transducer
Ultrasonic control
Reliability
Non destructive test
Ultrasonic transducer
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Summary:We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process based on the wafer-bonding technique. Paired tests showed the superior reliability characteristics of the PostCMUT design compared to those of conventional CMUT designs. No deleterious effect of the new design was seen in preliminary ultrasonic tests or in process yield. PostCMUTs, a design that serves as a solution to the aforementioned reliability problem, constitutes a major contribution to CMUT commercialization.
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ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2005.1428039