Surface acoustic wave microsensors and applications

Surface acoustic wave (SAW) devices have been studied for the last twenty years as highly sensitive yet relatively inexpensive microsensors for applications ranging from temperature and stress to gas and biological sensing. This wide range of applications is due to the SAW microsensors' high se...

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Bibliographic Details
Published inSmart materials and structures Vol. 6; no. 6; pp. 658 - 667
Main Authors Galipeau, David W, Story, Patrick R, Vetelino, Kevin A, Mileham, Russell D
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.1997
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Summary:Surface acoustic wave (SAW) devices have been studied for the last twenty years as highly sensitive yet relatively inexpensive microsensors for applications ranging from temperature and stress to gas and biological sensing. This wide range of applications is due to the SAW microsensors' high sensitivity to several physical parameters including mass, temperature, stress, and conductivity. Their low cost results from the use of standard batch microelectronic fabrication techniques for their manufacture. In this paper several chemical sensing applications for SAW devices are described. These include: gas detection; thin-film polymer characterization; dew-point measurements; surface energy measurements; and a method to measure surface cleanliness. Experimental results are presented along with comparisons to other measurement techniques. (Author)
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ISSN:0964-1726
1361-665X
DOI:10.1088/0964-1726/6/6/002