Thickness dependence of the properties and thermal stability of PtSi films
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Published in | Thin solid films Vol. 253; no. 1-2; pp. 467 - 472 |
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Main Authors | , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
15.12.1994
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Subjects | |
Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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DOI: | 10.1016/0040-6090(94)90368-9 |