Analysis of spurious peaks at series resonance in solidly mounted resonators by combined BVD-Mason modelling

• Published in: Ultrasonics Vol. 131; p. 106958
• Main Authors: Lugo-Hernández, E., Mirea, T., Carmona, J.M., Clement, M., Olivares, J., Carlos Collado, J., Mateu, J.
• Format: Journal Article
• Language: English
• Published: Netherlands Elsevier B.V 01.05.2023
• Subjects: FBAR; Mason model; Modified Butterworth; Ohmic losses; SMR; Spurious resonance; Modified Butterworth; Ohmic losses; SMR; FBAR; Mason model; Spurious resonance
• ISSN: 0041-624X; 1874-9968
• DOI: 10.1016/j.ultras.2023.106958

•Spurious peaks in SMRs can appear due to Ohmic losses (influence of series resistance)•Devices with larger active areas are more likely to display these undesired peaks.•Size of the active area has a limit to ensure good performance in SMRs.•Modelling of resonant spurious peaks using an updated mBVD and Mason’s models. Solidly Mounted Resonators (SMRs) for high frequency RF filters and sensing applications often display spurious resonances that distort their frequency response. In this work, we try to identify the origin of spurious resonances accompanying the main series resonances in AlN-based SMRs with the help of modified Butterworth Van Dyke (BVD) and Mason’s models. By manufacturing SMRs of different sizes and shapes and studying the influence of the position of the electrical probing spot, we have demonstrated both theoretically and experimentally that devices with larger areas are more likely to display these additional peaks. Our updated models accurately simulate the frequency response of the SMRs, revealing that spurious peaks are mostly related to the resistance of the electrodes. Our study clarifies the origin of the spurious resonances and offers solutions for both, the optimal design and measurement method of SMRs.