Asymmetric plasma potential fluctuation in an inductive plasma source
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Published in | Plasma sources science & technology Vol. 9; no. 1; pp. 5 - 11 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.02.2000
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0963-0252 1361-6595 |
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DOI: | 10.1088/0963-0252/9/1/302 |