Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge
We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electr...
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Published in | Journal of physics. Conference series Vol. 927; no. 1; pp. 12008 - 12012 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.11.2017
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Subjects | |
Online Access | Get full text |
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Summary: | We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electrons balance initial boundary value problem. |
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ISSN: | 1742-6588 1742-6596 1742-6596 |
DOI: | 10.1088/1742-6596/927/1/012008 |