Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge

We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electr...

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Published inJournal of physics. Conference series Vol. 927; no. 1; pp. 12008 - 12012
Main Authors Badriev, I B, Zheltukhin, V S, Ju Chebakova, V
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.11.2017
Subjects
Boundary value problems
Charged particles
Convection-diffusion equation
Density
Numerical methods
Physics
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Summary:We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electrons balance initial boundary value problem.
ISSN:1742-6588
1742-6596
1742-6596
DOI:10.1088/1742-6596/927/1/012008