Evaluating three-dimensional effects on the behavior of compliant bistable micromechanisms

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 18; no. 9; p. 095001
Main Authors Cherry, Brian B, Howell, Larry L, Jensen, Brian D
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.09.2008
Institute of Physics
Subjects
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Compliant mechanism
Stiction
Precision engineering
Shutter
Low power
Experimental study
Adhesion
Modeling
Bistability
Finite element method
Selector switch
Sensor array
Electrostatic force
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/18/9/095001