High-rate deposition of silicon films in a magnetron discharge with liquid target

• Published in: Journal of physics. Conference series Vol. 768; no. 1; pp. 12015 - 12018
• Main Authors: Tumarkin, A, Zibrov, M, Khodachenko, G, Tumarkina, D
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.10.2016
• Subjects: Bias; Carbon steels; Corrosion resistance; Corrosion resistant steels; Discharge; High temperature; Oxidation resistance; Physics; Protective coatings; Silicon films; Tungsten

Silicon coatings have been deposited on substrates made of low-carbon and high- carbon steels and tungsten in a magnetron discharge with liquid target at substrate bias voltages ranging from +100 V to -600 V. The structure of obtained coatings was examined by a scanning electron microscopy. The stro...