Tribological properties of CrZr–Si–N films synthesized using Cr–Zr–Si segment targets

• Published in: Surface & coatings technology Vol. 259; pp. 71 - 76
• Main Authors: Kim, Dong-Jun, La, Joung-Hyun, Kim, Kyu-Sung, Kim, Sung-Min, Lee, Sang-Yul
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 25.11.2014; Elsevier
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; CrZrSiN films; Diffraction; Exact sciences and technology; Friction; Friction coefficient; Hardness; Materials science; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Physics; Scanning electron microscopy; Segments; Silicon; Surface treatments; Thermal stability; Tribology; Wear; X-ray diffraction; Friction coefficient; CrZrSiN films; Hardness; Thermal stability; Friction; Mechanical properties; Friction factor; Surface treatments; Tribology
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2014.06.019

In this work, CrZr–Si–N films with various Si contents were synthesized by unbalanced magnetron sputtering with various (Cr+Zr):Si segment targets. Three types of segment targets with different volume ratios of Cr+Zr and Si (11:1, 5:1 and 3:1vol.%) were employed. Tribological properties of CrZr–Si–N films, as a function of the Si content, were investigated by a ball-on-disk type wear tester at room temperature and 500°C. After the wear test, the wear tracks were investigated by scanning electron microscope (SEM), energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and Raman spectroscopy. The results showed that the CrZr–Si–N films with low Si content showed excellent tribological properties at the room temperature such as low friction coefficient and smooth, narrow wear track diameter. However, at 500°C the tribological properties of CrZr–Si–N films were significantly improved with increasing Si content in the films as the thermal stabilities of CrZr–Si–N films were improved with increasing Si content. •Segment targets were successfully used to synthesize the CrZr–Si–N films.•Si contents in the films affected the mechanical and thermal properties strongly.•Test temperature and Si content are important factors for the tribological properties.