Capacitive coupled RF discharge: modelling at the local statement of the problem
In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other a...
Saved in:
Published in | Journal of physics. Conference series Vol. 789; no. 1; pp. 12004 - 12007 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.01.2017
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!