Capacitive coupled RF discharge: modelling at the local statement of the problem

• Published in: Journal of physics. Conference series Vol. 789; no. 1; pp. 12004 - 12007
• Main Authors: Badriev, I B, Chebakova, V Yu, Zheltukhin, V S
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.01.2017
• Subjects: Adequacy; Atmospheric models; Mathematical models; Numerical analysis; Numerical methods; Physics; Radio frequency discharge

In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other a...