Capacitive coupled RF discharge: modelling at the local statement of the problem

In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other a...

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Published inJournal of physics. Conference series Vol. 789; no. 1; pp. 12004 - 12007
Main Authors Badriev, I B, Chebakova, V Yu, Zheltukhin, V S
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.01.2017
Subjects
Adequacy
Atmospheric models
Mathematical models
Numerical analysis
Numerical methods
Physics
Radio frequency discharge
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Summary:In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other authors, in particular, with the experimental data, is demonstrated as well a model adequacy as effectiveness of the numerical method. A results of calculations of the model problem at pressure of 760 Torr, frequency of generator of 13.76 MHz and interelectrode distance of 20mm, in local approximation are presented.
ISSN:1742-6588
1742-6596
1742-6596
DOI:10.1088/1742-6596/789/1/012004