Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

In this study, we propose a magnetically driven micro-mirror, constructed using negative photoresist SU-8 containing magnetic particles, as a magnetic actuator and torsion bar structure. Because the magnetic polymer composite uses thick negative photoresist SU-8 as the main material, the micro-mirro...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 55; no. 6S1; pp. 6 - 06GP01
Main Authors Suzuki, Junya, Onishi, Yoshiyuki, Terao, Kyohei, Takao, Hidekuni, Shimokawa, Fusao, Oohira, Fumikazu, Miyagawa, Hayato, Namazu, Takahiro, Suzuki, Takaaki
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.06.2016
Subjects
Actuators
Deflection
Magnetic fields
Photolithography
Photoresists
Polymer matrix composites
Reactive ion etching
Scanning
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Summary:In this study, we propose a magnetically driven micro-mirror, constructed using negative photoresist SU-8 containing magnetic particles, as a magnetic actuator and torsion bar structure. Because the magnetic polymer composite uses thick negative photoresist SU-8 as the main material, the micro-mirror is simply fabricated in just a few steps by conventional photolithography and deep reactive ion etching. A fabricated prototype of the micro-mirror, which is magnetically driven by using an external magnetic field, is shown to deflect with two-dimensional optical deflection angles of 6.5 and 12.5°. Moreover, Lissajous scanning motion of the fabricated mirror is achieved.
Bibliography:ObjectType-Article-1
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content type line 23
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.06GP01