Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

• Published in: Journal of micromechanics and microengineering Vol. 21; no. 3; p. 035018
• Main Authors: Rouabah, Hamza A, Park, Benjamin Y, Zaouk, Rabih B, Morgan, Hywel, Madou, Marc J, Green, Nicolas G
• Format: Journal Article
• Language: English
• Published: Bristol IOP Publishing 01.03.2011; Institute of Physics
• Subjects: Applied fluid mechanics; Applied sciences; Biological and medical sciences; Biosensors; Biotechnology; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental and applied biological sciences. Psychology; Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Methods. Procedures. Technologies; Micromechanical devices and systems; Physics; Precision engineering, watch making; Various methods and equipments; Biotechnology; Pyrolysis; Electrokinetics; Epoxy resin; Osmosis; System on a chip; Carbon; Pumping; Flow(fluid); Electroosmosis; Flow velocity; Osmotic pump; Microelectromechanical device; High aspect ratio microstructure HARM; Microfluidics; Fluidics; Micropump; Photoresist
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/21/3/035018