Impact of Transverse Mode Resonances on Second Harmonic Generation in Radio-frequency Bulk Acoustic Wave Resonators

This paper investigates the impact of transverse mode resonances on second harmonic (H2) generation in radio-frequency bulk acoustic wave devices. Previous work indicated that second-order nonlinearity of the main mode can be well simulated by one-dimensional perturbation analysis using the h-form p...

Full description

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 58; no. SG; p. SGGC02
Main Authors Qiu, Luyan, Li, Xinyi, Matsuoka, Naoto, Omori, Tatsuya, Hashimoto, Ken-ya
Format Journal Article
LanguageEnglish
Published Tokyo IOP Publishing 01.07.2019
Japanese Journal of Applied Physics
Subjects
Acoustic resonance
Bulk acoustic wave devices
Constitutive equations
Constitutive relationships
Hydrogen production
Perturbation methods
Piezoelectricity
Radio frequency
Second harmonic generation
Two dimensional analysis
Online AccessGet full text

Cover

More Information
Summary:This paper investigates the impact of transverse mode resonances on second harmonic (H2) generation in radio-frequency bulk acoustic wave devices. Previous work indicated that second-order nonlinearity of the main mode can be well simulated by one-dimensional perturbation analysis using the h-form piezoelectric constitutive equations. This work expands the analysis to the two-dimensional case to investigate the influence of transverse resonances on the H2 generation. The result shows that transverse modes generate strong H2 responses, and this phenomenon is consistent with experimental results. The origin of the strong H2 generation is also discussed.
Bibliography:JJAP-s100302
ISSN:0021-4922
1347-4065
DOI:10.7567/1347-4065/ab0ba2