Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes

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Bibliographic Details
Published inPlasma sources science & technology Vol. 7; no. 2; pp. 119 - 129
Main Authors Schwabedissen, A, Benck, E C, Roberts, J R
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.05.1998
Institute of Physics
Subjects
Electrostatic waves and oscillations (e.g., ion-acoustic waves)
Electrostatic waves and oscillations (eg, ion-acoustic waves)
Exact sciences and technology
Mass and density
Measurements common to several branches of physics and astronomy
Metrology, measurements and laboratory procedures
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
Waves, oscillations, and instabilities in plasmas and intense beams
Inductively coupled plasma
Langmuir probes
Electron density
Experimental study
Comparative study
Metering
Plasma oscillations
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/7/2/005