Numerical simulation of discharge plasma generation and nitriding the metals and alloys

This research provides the numerical simulation of the plasma generation in a hollow cathode as well as the diffusion of nitrogen atoms into the metal in the low-pressure glow discharge plasma. The characteristics of the gas discharge were obtained and the relation of the basic technological paramet...

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Published inIOP conference series. Materials Science and Engineering Vol. 168; no. 1; pp. 12044 - 12049
Main Authors Koval, T V, Manakov, R A, Nguyen Bao, Hung, Tran My, Kim An
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.01.2017
Subjects
Diffusion
Gas discharges
Glow discharges
Hollow cathodes
Low pressure
Nitriding
Nitrogen atoms
Plasma
Titanium
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Summary:This research provides the numerical simulation of the plasma generation in a hollow cathode as well as the diffusion of nitrogen atoms into the metal in the low-pressure glow discharge plasma. The characteristics of the gas discharge were obtained and the relation of the basic technological parameters and the structural and phase state of the nitrided material were defined. Authors provided the comparison of calculations with the experimental results of titanium nitriding by low-pressure glow discharge plasma in a hollow cathode.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/168/1/012044