Formation of Micro-Patterning Ferroelectric Films

• Published in: Ferroelectrics Vol. 357; no. 1; pp. 28 - 34
• Main Authors: Zhao, Gaoyang, Zhang, Weihua, Deng, Xiaocui, Xu, Guomin
• Format: Journal Article Conference Proceeding
• Language: English
• Published: London Taylor & Francis Group 01.01.2007; Taylor and Francis
• Subjects: array; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Dielectric thin films; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Domain structure; hysteresis; Exact sciences and technology; Ferroelectric film; Ferroelectricity and antiferroelectricity; hysteresis loop; photosensitive gel film; Physics; Radiation effects; Photosensitivity; Polarization; Patterning; Inorganic compounds; hysteresis loop; Lanthanum Zirconates; Lead titanates; Transition element compounds; Heat treatments; Ferroelectric film; Lead zirconates; Thickness; Lanthanum Titanates; Ultraviolet radiation; PLZT; Ferroelectric materials; Laser radiation; array; Transition elements; Sol-gel process; photosensitive gel film; Ferroelectric hysteresis
• ISSN: 0015-0193; 1563-5112
• DOI: 10.1080/00150190701527498

The photosensitive PLZT gel films were prepared by chemical modified sol-gel process, and then were irradiated by double-beam of He-Cd UV laser in different direction and twice irradiation, subsequently, the array of PLZT gel film was obtained by leaching the irradiated gel film in ethanol. Finally, the array of ferroelectric films was obtained after heat treatment, the dot area and thickness of which are 500 nm × 500 nm and 50 nm with pitch of 1000 nm. The results of AFM and TF-Analyzer 2000 online-test indicate that the ferroelectric dots are of the polarization reversal, and exhibit the ferroelectric behaviors.