A study on the synthesis and formation behavior of nanostructured TiN films by copper doping

• Published in: Surface & coatings technology Vol. 177; pp. 404 - 408
• Main Authors: Myung, Hyun S., Han, Jeon G., Boo, Jin H.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 30.01.2004
• Subjects: Copper doping; Nanostructured coating; Superhard coating; Ti–Cu–N; Nanostructured coating; Ti–Cu–N; Superhard coating; Copper doping

Ti–Cu–N nanocomposite films with varying copper content were deposited by simultaneous co-deposition of titanium nitride and copper using a reactive arc ion plating and magnetron sputtering hybrid system. The structure and mechanical properties of these films were found to be dependent on the copper...