A triode-type carbon nanotube ionizer for micro mass spectrometer

This article presents an ionizer based on a triode structure for a micromachined time-of-flight mass spectrometer (TOFMS). The fabricated device has two components in one chip: a triode-type field emitter for ionization and an ion separator with acceleration electrodes. The electron emitter is an ar...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 53; no. 3; pp. 36703 - 1-036703-5
Main Authors Lee, Ki Jung, Jo, Minuk, Hong, Nguyen Tuan, Lee, Soonil, Oh, Jun Sik, Jung, Kwang Woo, Yang, Sang Sik
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.03.2014
Subjects
Acceleration
Anodes
Arrays
Devices
Electrodes
Emitters (electron)
Ionization
Ionizers
Mass spectrometers
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Summary:This article presents an ionizer based on a triode structure for a micromachined time-of-flight mass spectrometer (TOFMS). The fabricated device has two components in one chip: a triode-type field emitter for ionization and an ion separator with acceleration electrodes. The electron emitter is an array of carbon-nanotube (CNT) pillars grown by hot-filament chemical vapor deposition (HFCVD). The anode current measured in the field-emission characteristic test of the fabricated device is high, up to 72.1 µA. The gate current is about 5% of the anode current, which implies low electron interception. We confirmed the ionization by electron impact and obtained the mass spectrum of the air from the fabricated device using a microchannel plate (MCP). The results show that the fabricated TOFMS is feasible for cheap miniature mass spectral analyzers.
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.53.036703