Electromagnetic-acoustic high-Q silicon resonators for liquid phase sensing

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 57; no. 5; pp. 1000 - 1002
• Main Authors: Lucklum, Frieder, Jakoby, Bernhard
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.05.2010; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic measurements; Acoustics; Biomembranes; Damping; Density; Devices; Exact sciences and technology; Excitation; Frequency; Fundamental areas of phenomenology (including applications); Impedance; Liquid phases; Physics; Q factor; Reservoirs; Resonance; Resonators; Sensors; Silicon; Transduction; acoustical devices for the generation and reproduction of sound; Vibration; Viscosity; Electromagnetism; Density measurement; Thin plate; Membrane; Acoustic resonator; Silicon; Viscosimetry; Liquid phase; Vibrational mode; Electromagnetic device; Ultrasonic transducer
• ISSN: 0885-3010; 1525-8955
• DOI: 10.1109/TUFFC.2010.1511

Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of noncontact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.