Global simulation of the induction heating TSSG process of SiC for the effects of Marangoni convection, free surface deformation and seed rotation

• Published in: Journal of crystal growth Vol. 470; pp. 75 - 88
• Main Authors: Yamamoto, Takuya, Okano, Yasunori, Ujihara, Toru, Dost, Sadik
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.07.2017; Elsevier BV
• Subjects: A1. Computer simulation; A1. Fluid flows; A1. Heat transfer; A1. Magnetic fields; A1. Mass transfer; A2. Top seeded solution growth; Analysis; Buoyancy; Coils; Computer simulation; Convection heating; Deformation effects; Electromagnetic induction; Heat transfer; Induction heating; Magnetic fields; Marangoni convection; Surface tension; A1. Heat transfer; A1. Magnetic fields; A1. Mass transfer; A1. Computer simulation; A1. Fluid flows; A2. Top seeded solution growth
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2017.04.016

•Transport phenomena during the crystal growth of SiC in an induction heating TSSG system were investigated.•Effects of free surface deformation, Marangoni convection and seed rotation on the crystal growth were investigated.•A global simulation was performed.•Marangoni convection and electro-magnetic flows were dominant in the melt.•Marangoni convection had negative influences on the crystal growth of SiC.•Effect of seed rotation and free surface deformation had small and positive effects on the growth of SiC crystal. A global numerical simulation was performed for the induction heating Top-Seeded Solution Growth (TSSG) process of SiC. Analysis included the furnace and growth melt. The effects of interfacial force due to free surface tension gradient, the RF coil-induced electromagnetic body force, buoyancy, melt free surface deformation, and seed rotation were examined. The simulation results showed that the contributions of free surface tension gradient and the electromagnetic body force to the melt flow are significant. Marangoni convection affects the growth process adversely by making the melt flow downward in the region under the seed crystal. This downward flow reduces carbon flux into the seed and consequently lowers growth rate. The effects of free surface deformation and seed rotation, although positive, are not so significant compared with those of free surface tension gradient and the electromagnetic body force. Due to the small size of the melt the contribution of buoyancy is also small.