Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it...

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Bibliographic Details
Published inJournal of communications technology & electronics Vol. 68; no. 5; pp. 575 - 576
Main Author Luzanov, V. A.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.05.2023
Springer
Springer Nature B.V
Subjects
Communications Engineering
Engineering
Epitaxy
Lattice parameters
Nanoelectronics
Networks
Oxide coatings
Piezoelectric films
Piezoelectric transducers
Single crystals
Substrates
Zinc oxide
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Summary:To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimize the mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
ISSN:1064-2269
1555-6557
DOI:10.1134/S1064226923050108