Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna

• Published in: Sensors and actuators. A, Physical Vol. 95; no. 2; pp. 208 - 211
• Main Authors: Sakakibara, Takahisa, Izua, Hiroaki, Shibata, Takayuki, Tarui, Hisaki, Shibata, Kenichi, Kiyama, Seiichi, Kawahara, Nobuaki
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 01.01.2002; Elsevier Science
• Subjects: Applied sciences; Electronics; Energy; Exact sciences and technology; Hybrid microelectronics; thick films; MEMS; Micro energy-conversion device; Micro- and nanoelectromechanical devices (mems/nems); Micro-photovoltaic device; Microelectronic fabrication (materials and surfaces technology); Micromachine; Microwave antenna; Natural energy; Photoelectric conversion: solar cells and arrays; Photovoltaic conversion; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Solar cells. Photoelectrochemical cells; Solar energy; Microwave antenna; MEMS; Micro-photovoltaic device; Micro energy-conversion device; Micromachine; Manufacturing process; Measurement sensor; Integrated circuit; Energy conversion; Micromachining; Photovoltaic system; Power supply; Experimental study; Microelectromechanical device; Microphotography
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(01)00739-7

This paper reports a new power supply system that uses light and microwave simultaneously, to supply high and multiple voltages for micro electro mechanical systems (MEMS). This energy-conversion device has been newly developed by integrating micro-photovoltaic devices and microwave antenna that are designed to minimize the interference between them. The micro-photovoltaic devices can generate high voltages (up to 100 V), because a number of tiny thin-film photovoltaic cells are interconnected in series. On the other hand, large currents can be provided with low voltages when the microwave antenna is used. The characteristics of both the micro-photovoltaic devices and microwave antenna were evaluated simultaneously by light and microwave supply system. As a result, the maximum voltage and current for the micro-photovoltaic device were found to be 101 V and 88 μA, respectively. The voltage and current for the microwave conversion device (microwave antenna+rf-module) were found to be 4.5 V and 74 mA, respectively. Additionally, the high output voltages from the micro-photovoltaic devices could be stabilized by originally designed voltage-stabilizing circuits.