Thermal stability and dynamic magnetic properties of FeSiAl films fabricated by oblique deposition

• Published in: Journal of alloys and compounds Vol. 610; pp. 126 - 131
• Main Authors: Zhong, Xiaoxi, Phuoc, Nguyen N., Chai, Guozhi, Liu, Ying, Ong, C.K.
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier B.V 15.10.2014; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Damping; Deposition; Dynamics; Exact sciences and technology; Ferromagnetic resonance frequency; Magnetic anisotropy; Magnetic permeability; Magnetic properties and materials; Magnetic properties of monolayers and thin films; Magnetic properties of surface, thin films and multilayers; Magnetic resonance; Permeability; Physics; Sendust alloy; Spectra; Thermal stability; Sendust alloy; Ferromagnetic resonance frequency; Magnetic anisotropy; Thermal stability; Oblique incidence; Line widths; Dynamic properties; Iron alloys; Gilbert damping; Deposition process; Thin films; Ferromagnetic resonance; Silicon alloys; Aluminium alloys; Magnetic permeability; Resonance frequency; Transition element alloys
• ISSN: 0925-8388; 1873-4669
• DOI: 10.1016/j.jallcom.2014.04.169

•We prepared FeSiAl thin films using oblique deposition technique.•The microwave properties of FeSiAl thin films were systematically studied.•The thermal stability of microwave properties of FeSiAl films was studied in detail.•The permeabilities were got using shorted micro-strip transmission-line perturbation.•The thermal stability of properties we studied is relatively good and within 15%. In this study, the temperature dependence of the permeability spectra in range from 303K to 423K of FeSiAl thin films fabricated by oblique deposition are carried out. The resonance frequency is found to increase from 1.6GHz to 2.9GHz at room temperature with the oblique deposition angle changed from 18.4° to 45°. It is attributed to the increase of the magnetic anisotropy. The thermal stability of the resonance frequency and dynamic anisotropy are found to be within 15% in the temperature range from 303K to 423K. In addition, the behavior of the static and dynamic permeabilities, effective Gilbert damping factor, and frequency line width with temperature for FeSiAl films with different oblique deposition angles are presented and discussed in detail.