Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small def...

Full description

Saved in:
Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 52; no. 14; p. 3420
Main Authors Cheri, M Sadegh, Latifi, Hamid, Aghbolagh, F Beygi Azar, Naeini, O R Ranjbar, Taghavi, Majid, Ghaderi, Mohammadamir
Format Journal Article
LanguageEnglish
Published United States 10.05.2013
Subjects
Air Movements
Equipment Design
Equipment Failure Analysis
Fiber Optic Technology - instrumentation
Interferometry - instrumentation
Motion
Rheology - instrumentation
Systems Integration
Transducers
Online AccessGet more information

Cover

More Information
Summary:In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l/min) and a minimum detectable airflow change of 0.05 (l/min).
ISSN:2155-3165
DOI:10.1364/AO.52.003420