A two-stage discrete peristaltic micropump

We demonstrate a discrete, two-stage peristaltic micropump for applications in microfluidics. Prototypes are fabricated in polydimethylsiloxane (PDMS) with water as the working fluid. Off-wafer compressed nitrogen gas provides the actuation energy. The device may be operated in three- or two-stage m...

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Bibliographic Details
Published inSensors and actuators. A. Physical. Vol. 104; no. 1; pp. 6 - 10
Main Authors Berg, J.M., Anderson, R., Anaya, M., Lahlouh, B., Holtz, M., Dallas, T.
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier B.V 15.03.2003
Elsevier Science
Subjects
Applied sciences
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Microfabrication
Microfluidics
Micropumps
PDMS
Peristaltic
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Peristaltic
Micropumps
Microfabrication
Microfluidics
PDMS
Prototype
Manufacturing process
Peristaltic flow
Experimental study
Siloxane copolymer
Microelectromechanical device
Micropump
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Summary:We demonstrate a discrete, two-stage peristaltic micropump for applications in microfluidics. Prototypes are fabricated in polydimethylsiloxane (PDMS) with water as the working fluid. Off-wafer compressed nitrogen gas provides the actuation energy. The device may be operated in three- or two-stage modes for direct comparison. We show that two-stage pumps have comparable flow rates to the three-stage counterparts, and produce ∼2/3 the static head. Our results suggest that two-stage pumps may be a viable choice under low backpressure conditions where available on-chip area or the number of external connections is limited.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(02)00434-X