Si–Zr alloy thin-film anodes for microbatteries
Zr–Si thin films were deposited on copper substrates by co-sputtering method of two pure targets. The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The composition was measured by Rutherford backscattering spectros...
Saved in:
Published in | Journal of power sources Vol. 119; pp. 113 - 116 |
---|---|
Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.06.2003
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!