Si–Zr alloy thin-film anodes for microbatteries

• Published in: Journal of power sources Vol. 119; pp. 113 - 116
• Main Authors: Lee, Seung-Joo, Lee, Heon-Young, Baik, Hong-Koo, Lee, Sung-Man
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.06.2003
• Subjects: Lithium battery; Microbattery; Thin-film anode; Thin-film battery; Zr–Si; Lithium battery; Thin-film battery; Zr–Si; Microbattery; Thin-film anode

Zr–Si thin films were deposited on copper substrates by co-sputtering method of two pure targets. The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The composition was measured by Rutherford backscattering spectros...