A triangular section magnetic solenoid filter for removal of macro- and nano-particles from pulsed graphite cathodic vacuum arc plasmas

• Published in: Surface & coatings technology Vol. 200; no. 7; pp. 2243 - 2248
• Main Authors: Liu, Y.H., Zhang, J.L., Liu, D.P., Ma, T.C., Benstetter, G.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 21.12.2005; Elsevier
• Subjects: AFM; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Filtered arc; Magnetic filter; Materials science; Other topics in materials science; Particles; Physics; Magnetic filter; AFM; Particles; Filtered arc; Removal; Atomic force microscopy; Plasma; Plasma arc; Surface treatments
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2004.09.032

A novel magnetic filter with the triangular section has been designed to remove the macro- and nano-particles from the pulsed cathodic arc plasmas utilized to prepare the tetrahedral amorphous carbon (ta-C) films. The macro- and nano-particles at the surfaces of ta-C films were observed using an optical microscope and an atomic force microscope. The filter was found to be very effective in removing the macro- and nano-particles due to its zigzag-type inner surface structure. Particles that collided with the inner surface of the filter were reflected along the direction opposite to the plasma beam, and therefore separated from the arc plasma. The effect of arc current on the filter efficiency has also been investigated.