Modification of ceramic coatings by swift heavy ions
Throughout the last decade, swift heavy ions (SHI) of some MeV/amu kinetic energy have revealed to be an excellent tool for the “nano-modification” of materials. Besides the already existing ion-track technology, which makes use of the structural and property alterations of the material inside the t...
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Published in | Surface & coatings technology Vol. 200; no. 5; pp. 1430 - 1435 |
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Main Authors | , , , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
21.11.2005
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | Throughout the last decade, swift heavy ions (SHI) of some MeV/amu kinetic energy have revealed to be an excellent tool for the “nano-modification” of materials. Besides the already existing ion-track technology, which makes use of the structural and property alterations of the material inside the tracks of spatially isolated single-ion impacts, we have recently found that thin oxide films can be restructured on a sub-μm scale by triggering structural instabilities and subsequent self-assembly processes with high fluence SHI irradiation. This way, sometimes, quite regular arrays of nano-structures at the surface and at the interface of the layer system can be achieved, which cover a large area. In the present paper, we will briefly summarize our results on self-organization effects in thin oxide-films on Si and SiO
2, driven by capillary forces (dewetting phenomena), by ion-beam induced tensile stresses (lamellae and “nano-tower” formation) and by the pressure pulse due to the density change upon transient melting of the material inside the ion-track (ripple formation at the interface). |
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Bibliography: | SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 |
ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/j.surfcoat.2005.08.066 |