Studies of the discharge properties of unbalanced magnetron sputtering system

In this paper, an unbalanced magnetron sputtering system was set up using a conventional magnetron and a coaxial electro-solenoid. The discharge properties were experimentally investigated. The model of the voltage–current ( V– I) property of the unbalanced magnetron sputtering (UBM) system was deve...

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Bibliographic Details
Published inSurface & coatings technology Vol. 193; no. 1; pp. 46 - 49
Main Authors Zongxin, Mu, Guoqing, Li, Deliang, Che, Kaiyu, Huang, Cui, Liu
Format Journal Article Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier B.V 01.04.2005
Elsevier
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Magnetron
Materials science
Other topics in materials science
Physics
Plasma
Plasma
Film
Magnetron
Magnetrons
Physical vapor deposition
Surface treatments
Sputtering
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Summary:In this paper, an unbalanced magnetron sputtering system was set up using a conventional magnetron and a coaxial electro-solenoid. The discharge properties were experimentally investigated. The model of the voltage–current ( V– I) property of the unbalanced magnetron sputtering (UBM) system was developed. The comparisons of the simulation with the experimental data indicated that the model expressed the discharge properties of the UBM sputtering system correctly.
Bibliography:SourceType-Scholarly Journals-2
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ObjectType-Conference Paper-1
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SourceType-Conference Papers & Proceedings-1
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ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2004.07.059