Interface Layers of Niobium Nitride Thin Films

Intermediate layers formed by thin NbN films are studied. A surface phase of NbN different from the bulk one under the oxide layer and a layer consisting of NbNx-SiOy between the film and the substrate are found.

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Bibliographic Details
Published in6th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, SPbOPEN 2019, Saint Petersburg, Russia Vol. 1410; no. 1; pp. 12124 - 12128
Main Authors Lubenchenko, A V, Iachuk, V A, Krause, S, Pavolotsky, A B, Ivanov, D A, Lubenchenko, O I, Pavlov, O N
Format Journal Article Conference Proceeding
LanguageEnglish
Published Bristol IOP Publishing 01.12.2019
Subjects
Niobium nitride
Physics
Substrates
Thin films
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Summary:Intermediate layers formed by thin NbN films are studied. A surface phase of NbN different from the bulk one under the oxide layer and a layer consisting of NbNx-SiOy between the film and the substrate are found.
ISSN:1742-6588
1742-6596
1742-6596
DOI:10.1088/1742-6596/1410/1/012124