Synthesis of oriented nanotube films by chemical vapor deposition

• Published in: Carbon (New York) Vol. 40; no. 8; pp. 1339 - 1344
• Main Authors: Mauron, Ph, Emmenegger, Ch, Züttel, A., Nützenadel, Ch, Sudan, P., Schlapbach, L.
• Format: Journal Article
• Language: English
• Published: Oxford Elsevier Ltd 01.07.2002; Elsevier Science
• Subjects: A. Carbon nanotubes; B. Chemical vapor deposition; C. Electron microscopy; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Cross-disciplinary physics: materials science; rheology; D. Density; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Nanoscale materials and structures: fabrication and characterization; Particle size; Physics; B. Chemical vapor deposition; C. Electron microscopy; Particle size; D. Density; A. Carbon nanotubes; CVD; Scanning electron microscopy; Films; Crystal orientation; Nonmetals; Thick films; Carbon nanotubes; Crystal growth from vapors; Experimental study; Carbon; Density
• ISSN: 0008-6223; 1873-3891
• DOI: 10.1016/S0008-6223(01)00295-0

Oriented nanotube films (20–35 μm thick) were synthesised on flat silicon substrates by chemical vapor deposition (CVD) of a gas mixture of acetylene and nitrogen. For the CVD we used metal oxide clusters formed by spin coating an iron(III) nitrate ethanol solution onto a silicon substrate and subsequent heating. The cluster density and its effects on the nanotube density were investigated as a function of the iron(III) nitrate concentration and the synthesis temperature. A high nanotube density was achieved with a high density of iron oxide clusters as nucleation centres for the growth of nanotubes. The cluster density was controlled by the iron(III) concentration of the ethanolic coating solution and by the synthesis temperature. The perpendicular orientation of the nanotubes with respect to the substrate surface is attributed to a high density of nanotubes.