Laser processing of micro-optical components in quartz

Laser induced backside wet etching combined with the diffractive gray tone phase mask has been used for the fabrication of a micro-lens array with a single lens diameter of 1 mm and a micro-prism in quartz. The micro-lens array was tested as beam homogenizer for high power XeCl excimer laser yieldin...

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Bibliographic Details
Published inApplied surface science Vol. 254; no. 4; pp. 1073 - 1078
Main Authors Kopitkovas, G., Lippert, T., Murazawa, N., David, C., Wokaun, A., Gobrecht, J., Winfield, R.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.12.2007
Subjects
Beam homogenizer
LIBWE
Micro-optics
Quartz
Beam homogenizer
LIBWE
Quartz
Micro-optics
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Summary:Laser induced backside wet etching combined with the diffractive gray tone phase mask has been used for the fabrication of a micro-lens array with a single lens diameter of 1 mm and a micro-prism in quartz. The micro-lens array was tested as beam homogenizer for high power XeCl excimer laser yielding a clear improvement in the quality of the laser beam. The optimum fluence range for fabrication of micro-lenses by laser induced backside wet etching using 1.4 M pyrene in THF solution and 308 nm irradiation wavelength is 1–1.6 J/cm 2. The etching mechanisms of LIBWE are based on a combination of pressure and temperature jumps at quartz–liquid interface.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2007.09.048