Differential interferometry with a complex contrast
We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10 −13 m/ Hz . In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the inter...
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Published in | Optics communications Vol. 207; no. 1; pp. 49 - 56 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier B.V
15.06.2002
Elsevier Science Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than
10
−13
m/
Hz
. In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0030-4018 1873-0310 |
DOI: | 10.1016/S0030-4018(02)01475-X |