Differential interferometry with a complex contrast

• Published in: Optics communications Vol. 207; no. 1; pp. 49 - 56
• Main Authors: Bellon, L., Ciliberto, S., Boubaker, H., Guyon, L.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.06.2002; Elsevier Science; Elsevier
• Subjects: Exact sciences and technology; Instrumentation and Detectors; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Interferometers; Measurements common to several branches of physics and astronomy; Metrology, measurements and laboratory procedures; Optical instruments, equipment and techniques; Optics; Physics; Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements); Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements); 42.62.Eh; 06.30.Bp; 07.60.Ly; Thermal drift; Light interferometry; Sensitivity; Noise; Differential interferometry; Displacement measurement; Theoretical study; Measuring methods; Experimental study; quadrature phase; interferometer
• ISSN: 0030-4018; 1873-0310
• DOI: 10.1016/S0030-4018(02)01475-X

We present a new design of the Nomarski interferometer, which can measure displacements of several microns, with a resolution better than 10 −13 m/ Hz . In the standard design this sensitivity can be achieved only within a 100 nm displacement range. One main advantage of this new set-up of the interferometer is the total independence of the measure sensitivity on the interferometer thermal drifts.