Measurement of ion temperature in electron cyclotron resonance plasma

Ion temperatures parallel and perpendicular to an applied magnetic field are measured in electron cyclotron resonance (ECR) plasmas under a divergent or a mirror magnetic field configuration using a directional analyzer. The temperatures obtained as a function of gas pressure are found to be low (0....

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 32; no. 11B; pp. L1698 - L1700
Main Authors OKUNO, Y, OHTSU, Y, FUJITA, H, WEI CHEN, MIYAKE, S
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 01.11.1993
Subjects
Electric and magnetic measurements
Exact sciences and technology
Optical (ultraviolet, visible, infrared) measurements
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
Plasma production and heating
Plasma sources
Doppler broadening
Plasma diagnostics
Emission spectroscopy
Electron cyclotron-resonance
Ion temperature
Measuring methods
Optical spectrometers
Magnetic fields
Electrostatic analyzers
Plasma sources
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Summary:Ion temperatures parallel and perpendicular to an applied magnetic field are measured in electron cyclotron resonance (ECR) plasmas under a divergent or a mirror magnetic field configuration using a directional analyzer. The temperatures obtained as a function of gas pressure are found to be low (0.2∼0.5 eV) and are compared with those measured by optical emission spectroscopy of Doppler profiles. The temperatures perpendicular to the magnetic field from the two different methods agree well for both magnetic configurations. The reliability of the measurement using the directional analyzer is discussed considering the ion motions in the sheath in front of the analyzer and in the magnetic field.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.32.l1698