Optical properties of chromium oxide thin films deposited by electron-beam evaporation
Thin films of chromium oxide were deposited by electron-beam evaporation. The effects of substrate temperature on the structural, chemical and optical properties of the films were investigated. Films deposited on unheated substrates were amorphous and almost stoichiometric, whereas those deposited a...
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Published in | Optical materials Vol. 29; no. 6; pp. 709 - 713 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.02.2007
Elsevier Science |
Subjects | |
Online Access | Get full text |
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Summary: | Thin films of chromium oxide were deposited by electron-beam evaporation. The effects of substrate temperature on the structural, chemical and optical properties of the films were investigated. Films deposited on unheated substrates were amorphous and almost stoichiometric, whereas those deposited at 300
°C had microcrystallites embedded in an amorphous matrix and were less stoichiometric. The optical properties of the films were derived from transmittance measurements. It was found that the refractive index, the extinction coefficient and the optical bandgap all increased with substrate temperature. |
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ISSN: | 0925-3467 1873-1252 |
DOI: | 10.1016/j.optmat.2005.11.020 |