Simulation of topography evolution and damage formation during TEM sample preparation using focused ion beams

Our recently developed simulation code FIBSIM is applied to topics related to transmission electron microscopy (TEM) sample preparation using focused ion beams (FIB). FIBSIM combines dynamic Monte Carlo simulation of collision cascades with two-dimensional, cell-based topography simulation. The infl...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 175; pp. 102 - 107
Main Authors Boxleitner, W., Hobler, G., Klüppel, V., Cerva, H.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.04.2001
Subjects
Focused ion beam
Ion beam milling
Monte Carlo simulation
Sputtering
Topography simulation
61.16.Bg
79.20.Rf
61.80.Az
Focused ion beam
Ion beam milling
Topography simulation
61.72.Tt
Sputtering
Monte Carlo simulation
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Summary:Our recently developed simulation code FIBSIM is applied to topics related to transmission electron microscopy (TEM) sample preparation using focused ion beams (FIB). FIBSIM combines dynamic Monte Carlo simulation of collision cascades with two-dimensional, cell-based topography simulation. The influence of the scanning mode and of the beam current profile on the evolution of the surface contour is investigated. Furthermore, amorphous zones in silicon samples and damaged regions are predicted for different beam energies of 10, 30 and 50 keV. The thickness of the predicted amorphous regions is in good agreement with experimental TEM data.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(01)00334-2