Systematic study of the surface morphology of ordered (GaIn)P

• Published in: Applied surface science Vol. 165; no. 1; pp. 60 - 69
• Main Authors: Pietzonka, Ines, Saß, Torsten, Gottschalch, Volker
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.09.2000; Elsevier Science
• Subjects: (GaIn)P; AFM; Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; MOVPE; Physics; Solid surfaces and solid-solid interfaces; Structure and morphology; thickness; Surface; Surface structure and topography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; 07.79.L; 68.35.B; AFM; 81.05.D; MOVPE; Surface; 81.15.K; (GaIn)P; IC; GB; CKD; APN; SZE; Atomic force microscopy; Inorganic compounds; Zinc additions; Ternary compounds; Doped materials; Step; Experimental study; Fabrication property relation; Surface structure; Gallium phosphides; Indium phosphides; MOVPE method; Mismatch lattice; p-type conductors
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(00)00360-3

The surface morphology of CuPt B-type ordered (GaIn)P, lattice-matched grown on (001)GaAs by low-pressure MOVPE, was systematically investigated by means of atomic force microscopy. Since surface steps, e.g. provided by different misorientations of the substrates, are known to affect the ordering behaviour, the superstep distances and heights are examined in order to correlate the surface structure to the existing ordering. In order to correlate both surface morphology and ordering, experiments have been performed varying the growth parameters and the partial pressure of the phosphorous precursors phosphine (PH 3), tertiarybutylphosphine (TBP) and ditertiarybutylphosphine (DitBuPH), and finally the Zn doping concentration. From these results, in addition to previously reported data [S.H. Lee, G.B. Stringfellow, J. Appl. Phys. 83 (1998) 3620], generally valid dependencies for the superstep distances, superstep heights, and the degree of ordering are derived and interpreted.