Simultaneous Control of Dielectric Charge and Device Capacitance in Electrostatic MEMS

This letter presents a double closed loop for simultaneously controlling the net dielectric charge and the device capacitance in contactless electrostatic MEMS devices. The first loop controls the net charge trapped in the dielectric layer by continuously monitoring the horizontal displacement of th...

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Bibliographic Details
Published inJournal of microelectromechanical systems Vol. 24; no. 6; pp. 1684 - 1686
Main Authors Gorreta, S., Pons-Nin, J., Dominguez-Pumar, M.
Format Journal Article Publication
LanguageEnglish
Published New York IEEE 01.12.2015
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Capacitance
Capacitance measurement
Capacitance-voltage characteristics
charge control
Dielectric charging
Dielectrics
Electric engineering
Enginyeria electrònica
Enginyeria elèctrica
MEMS
Micromechanical devices
Performance evaluation
positioners
Radio frequency
varactors
Àrees temàtiques de la UPC
charge control
MEMS
positioners
varactors
Dielectric charging
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Summary:This letter presents a double closed loop for simultaneously controlling the net dielectric charge and the device capacitance in contactless electrostatic MEMS devices. The first loop controls the net charge trapped in the dielectric layer by continuously monitoring the horizontal displacement of the C-V characteristic and applying bipolar actuation voltages to keep such net charge at the target value. The second loop adapts the actuation voltages so that the measured capacitance matches a desired value while maintaining the primary control of charge.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2015.2493581