Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measure...

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Bibliographic Details
Published inAdvances in radio science Vol. 10; no. 4; pp. 13 - 18
Main Authors Rohland, M, Arz, U, Kuhlmann, K, Büttgenbach, S
Format Journal Article
LanguageEnglish
German
Published Katlenburg-Lindau Copernicus GmbH 18.09.2012
Copernicus Publications
Subjects
Silicon
Waveguides
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Summary:We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range.
ISSN:1684-9973
1684-9965
1684-9973
DOI:10.5194/ars-10-13-2012