Helium ion microscopy

Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution microscopy and nanofabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nanostructures but also allows to create these features. The la...

Full description

Saved in:
Bibliographic Details
Published inJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Vol. 32; no. 2
Main Authors Hlawacek, Gregor, Veligura, Vasilisa, van Gastel, Raoul, Poelsema, Bene
Format Journal Article
LanguageEnglish
Published 01.03.2014
Online AccessGet full text
ISSN2166-2746
1520-8567
2166-2754
DOI10.1116/1.4863676

Cover

Abstract Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution microscopy and nanofabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nanostructures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.
AbstractList Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution microscopy and nanofabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nanostructures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.
Author Hlawacek, Gregor
Poelsema, Bene
van Gastel, Raoul
Veligura, Vasilisa
Author_xml – sequence: 1
  givenname: Gregor
  surname: Hlawacek
  fullname: Hlawacek, Gregor
  email: g.hlawacek@utwente.nl
  organization: Physics of Interfaces and Nanomaterials, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE Enschede, The Netherlands
– sequence: 2
  givenname: Vasilisa
  surname: Veligura
  fullname: Veligura, Vasilisa
  organization: Physics of Interfaces and Nanomaterials, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE Enschede, The Netherlands
– sequence: 3
  givenname: Raoul
  surname: van Gastel
  fullname: van Gastel, Raoul
  organization: Physics of Interfaces and Nanomaterials, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE Enschede, The Netherlands
– sequence: 4
  givenname: Bene
  surname: Poelsema
  fullname: Poelsema, Bene
  organization: Physics of Interfaces and Nanomaterials, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE Enschede, The Netherlands
BookMark eNp9jztLA0EURgeJ4BpTWNinVdhk7rxTSlAjBGy0HmbnASP7YmYV8u_dkKig4m1uc75z73eOJm3XeoQuAS8AQCxhwZSgQooTVAAnuFRcyAkqCAhREsnEGZrl_IrHEYpjigt0tfF1fGvmsWvnTbSpy7brdxfoNJg6-9lxT9HL_d3zelNunx4e17fb0jKMh9KBE56FlWVMVbQKhFeVIdQEJleSYY-lUEox5irKsQRmHKfUSRmIpTxARafo-uDdH87JB92n2Ji004D1vpIGfaw0sssfrI2DGcbHh2Ri_Wfi5pDIn-SX_r1L36DuXfgP_m3-ACqXaRY
CODEN JVTBD9
CitedBy_id crossref_primary_10_1016_j_ijhydene_2016_02_041
crossref_primary_10_1088_0957_4484_26_43_434001
crossref_primary_10_1016_j_biotechadv_2018_03_006
crossref_primary_10_1021_acsnano_6b02489
crossref_primary_10_1103_PhysRevB_102_165401
crossref_primary_10_1116_1_5048054
crossref_primary_10_1515_zna_2023_0200
crossref_primary_10_3762_bjnano_6_175
crossref_primary_10_1155_2023_2936788
crossref_primary_10_1002_aelm_202400037
crossref_primary_10_1038_s41592_020_01055_6
crossref_primary_10_1038_s41524_023_01157_7
crossref_primary_10_1038_s41598_017_16949_3
crossref_primary_10_1007_s11837_019_03869_y
crossref_primary_10_1007_s00339_014_8763_y
crossref_primary_10_3762_bjnano_9_267
crossref_primary_10_1063_1_4989981
crossref_primary_10_1063_5_0162597
crossref_primary_10_3762_bjnano_12_13
crossref_primary_10_1016_j_jsamd_2023_100649
crossref_primary_10_1038_s41467_018_03316_7
crossref_primary_10_7567_JJAP_56_06GC01
crossref_primary_10_1016_j_ijheatmasstransfer_2019_118985
crossref_primary_10_1021_acsnano_1c00587
crossref_primary_10_7567_APEX_7_106601
crossref_primary_10_1021_acsnano_5b03815
crossref_primary_10_3762_bjnano_11_167
crossref_primary_10_1116_1_4928744
crossref_primary_10_3389_frwa_2022_935035
crossref_primary_10_1116_1_5086271
crossref_primary_10_1038_srep30481
crossref_primary_10_1093_micmic_ozac049
crossref_primary_10_3762_bjnano_12_18
crossref_primary_10_1038_s41598_019_41357_0
crossref_primary_10_1088_1361_6528_abae99
crossref_primary_10_1002_fuce_201800047
crossref_primary_10_1038_s41467_020_20753_5
crossref_primary_10_1038_s41598_020_71682_8
crossref_primary_10_1063_1_4947095
crossref_primary_10_3762_bjnano_7_28
crossref_primary_10_1088_2053_1583_aa6b17
crossref_primary_10_7498_aps_68_20181864
crossref_primary_10_3762_bjnano_12_25
crossref_primary_10_3390_ijms23010205
crossref_primary_10_1116_1_5096908
crossref_primary_10_1021_acs_nanolett_6b04729
crossref_primary_10_1021_acs_nanolett_4c00356
crossref_primary_10_3762_bjnano_11_111
crossref_primary_10_1002_smtd_202100223
crossref_primary_10_1021_acs_jpcc_2c03707
crossref_primary_10_1038_srep16786
crossref_primary_10_1002_adma_202210667
crossref_primary_10_1021_acsaelm_0c00627
crossref_primary_10_1021_acsaelm_0c00901
crossref_primary_10_1063_1_4944491
crossref_primary_10_5772_59098
crossref_primary_10_1002_admi_202300385
crossref_primary_10_1088_1361_6528_aab82c
crossref_primary_10_1063_1_5128657
crossref_primary_10_1116_1_4981016
crossref_primary_10_1021_acs_analchem_7b01481
crossref_primary_10_1021_acsami_8b08471
crossref_primary_10_1063_5_0122487
crossref_primary_10_1021_acs_nanolett_1c01416
crossref_primary_10_1021_acs_jpcc_0c07269
crossref_primary_10_1039_D1TB00627D
crossref_primary_10_1088_2631_7990_abc673
crossref_primary_10_1063_1_4972262
crossref_primary_10_1186_s11671_022_03665_9
crossref_primary_10_1557_adv_2018_33
crossref_primary_10_1016_j_nimb_2014_11_073
crossref_primary_10_1038_s41598_022_27249_w
crossref_primary_10_1109_TASC_2016_2525988
crossref_primary_10_1080_23746149_2021_2003244
crossref_primary_10_1103_PhysRevApplied_22_054026
crossref_primary_10_1002_adbi_201700070
crossref_primary_10_1002_smll_201904738
crossref_primary_10_1088_1367_2630_aa9461
crossref_primary_10_1109_TMAG_2016_2530622
crossref_primary_10_1116_1_4967183
crossref_primary_10_1021_acs_analchem_7b04418
crossref_primary_10_1002_admt_201600237
crossref_primary_10_7567_1347_4065_ab01d4
crossref_primary_10_1021_acsnano_5b05754
crossref_primary_10_1155_2020_8406917
crossref_primary_10_1021_acsaelm_2c00499
crossref_primary_10_1063_1_5096596
crossref_primary_10_1002_smll_201907450
crossref_primary_10_1016_j_coal_2021_103745
crossref_primary_10_1103_PhysRevMaterials_4_013601
crossref_primary_10_1016_j_cossms_2023_101108
crossref_primary_10_1016_j_mee_2016_12_009
crossref_primary_10_1109_TCI_2021_3076887
crossref_primary_10_3390_ma14113048
crossref_primary_10_1002_advs_202302770
crossref_primary_10_1021_acs_nanolett_0c02060
crossref_primary_10_1088_2053_1583_ac8e7e
crossref_primary_10_1063_1_4875480
crossref_primary_10_1002_adfm_202313413
crossref_primary_10_1109_TED_2019_2940562
crossref_primary_10_1002_smll_201501540
crossref_primary_10_1021_acsami_8b18083
crossref_primary_10_1088_0953_8984_26_16_165401
crossref_primary_10_1016_j_ultramic_2016_05_010
crossref_primary_10_1017_S1431927620014105
crossref_primary_10_1117_1_JMM_18_2_023505
crossref_primary_10_1098_rsta_2023_0197
crossref_primary_10_1146_annurev_anchem_061318_115457
crossref_primary_10_3762_bjnano_11_156
crossref_primary_10_1038_s41598_022_06960_8
crossref_primary_10_1116_6_0004020
crossref_primary_10_1088_1361_6528_ab4a65
crossref_primary_10_1088_1361_6528_ad6e88
crossref_primary_10_1088_1361_6668_ad88e2
crossref_primary_10_1088_1361_6528_abafd6
crossref_primary_10_1002_adma_201703713
crossref_primary_10_1039_C9NR00412B
crossref_primary_10_3390_molecules29153527
crossref_primary_10_3762_bjnano_6_114
crossref_primary_10_1017_S1431927617000502
crossref_primary_10_1039_C5AN00524H
crossref_primary_10_1002_smtd_202301364
crossref_primary_10_1016_j_atmosenv_2024_120427
crossref_primary_10_1088_1361_648X_ab8cd9
crossref_primary_10_1063_1_4890390
crossref_primary_10_1063_5_0245804
crossref_primary_10_1016_j_ultramic_2020_112952
crossref_primary_10_1029_2023JE007911
crossref_primary_10_1088_1367_2630_acdf13
crossref_primary_10_1002_pssr_201700333
crossref_primary_10_1016_j_jnucmat_2024_155377
crossref_primary_10_1016_j_actamat_2018_01_015
crossref_primary_10_1063_1_4947277
crossref_primary_10_1007_s11426_016_9016_5
crossref_primary_10_1021_acsami_8b00427
crossref_primary_10_1016_j_ssi_2019_06_004
crossref_primary_10_1088_1361_6641_ab57ba
crossref_primary_10_1016_j_apsusc_2020_147922
crossref_primary_10_1088_1361_6528_ab4847
crossref_primary_10_1016_j_ultramic_2018_12_014
crossref_primary_10_1017_S1431927618016227
crossref_primary_10_1088_1361_6633_ac1e32
crossref_primary_10_1039_D3NA00528C
crossref_primary_10_1557_s43578_020_00041_0
crossref_primary_10_1017_S1431927617002070
crossref_primary_10_3390_nano11081895
crossref_primary_10_1016_j_promfg_2019_02_038
crossref_primary_10_1116_1_4900728
crossref_primary_10_1116_6_0000220
crossref_primary_10_1016_j_jnucmat_2017_07_054
crossref_primary_10_1088_1361_6528_abc91c
Cites_doi 10.1063/1.4726112
10.1116/1.584014
10.1016/j.progsurf.2012.05.001
10.1016/S0168-583X(01)00465-7
10.1007/BFb0104311
10.1002/sca.20267
10.1116/1.3237101
10.1116/1.3502667
10.1016/j.physrep.2013.02.001
10.1134/S1027451010050186
10.1088/0957-4484/24/17/175302
10.1116/1.3517536
10.1088/0957-4484/23/39/395302
10.1016/j.nimb.2012.12.052
10.1016/j.ultramic.2012.07.026
10.1016/j.nimb.2011.10.070
10.1016/0370-1573(81)90106-X
10.1017/S1431927612013463
10.1017/S1431927611005514
10.1016/0031-8914(73)90154-7
10.1116/1.568515
10.1166/jnn.2012.4260
10.1007/978-3-7091-0424-8
10.1021/nl801472n
10.1116/1.1526694
10.1063/1.59188
10.1017/S1431927610093682
10.1016/0001-6160(87)90034-4
10.1103/PhysRevA.12.876
10.1088/0957-4484/19/41/415704
10.1016/0022-3697(90)90144-5
10.1143/JJAP.31.L291
10.1016/j.nima.2010.12.220
10.1063/1.2799423
10.1016/j.ultramic.2013.07.010
10.1017/S1551929512000715
10.1080/00337577908234484
10.1016/j.nima.2010.12.123
10.1016/0169-4332(93)90301-Q
10.1021/la204437r
10.1063/1.4792511
10.1088/0957-4484/24/33/335702
10.1002/sia.2107
10.3762/bjnano.3.58
10.1063/1.1947391
10.3762/bjnano.4.53
10.1116/1.3271254
10.1016/0029-554X(78)90916-3
10.1002/sia.740010103
10.1116/1.2357967
10.1117/12.886347
10.1007/s00339-004-2869-6
10.1116/1.3237095
10.1016/j.phpro.2008.07.088
10.1143/JJAP.37.L398
10.1002/sca.21003
10.1002/sca.20268
10.1016/S0022-5320(67)80038-8
10.1016/0029-554X(65)90154-0
10.1063/1.4726053
10.1017/S1431927609090138
10.1007/BF01342199
10.1017/S1551929511000307
10.1116/1.568497
10.1103/PhysRevB.38.1087
10.1016/j.microrel.2012.06.130
10.1103/PhysRevB.81.153401
10.1021/nl202269n
10.1103/PhysRev.59.913
10.3762/bjnano.3.67
10.1016/0167-9317(85)90022-X
10.1016/j.nimb.2009.03.069
10.1002/sca.21009
10.1088/0957-4484/22/28/285310
10.1103/PhysRevLett.84.378
10.1016/j.scriptamat.2011.03.013
10.1016/j.carbon.2009.12.057
10.1016/0169-4332(95)00351-7
10.1007/978-3-642-67112-8_5
10.1116/1.2101792
10.1021/nn401992q
10.1007/978-3-540-87529-1
10.1016/j.surfcoat.2006.01.075
10.1116/1.3511509
10.1116/1.3258634
10.1103/PhysRevB.24.4412
10.1088/0957-0233/22/2/024004
10.1116/1.584328
10.1073/pnas.72.5.1826
10.1093/oxfordjournals.jmicro.a023780
10.1016/j.nimb.2008.11.003
10.1016/0168-583X(93)90781-Z
10.1016/j.ultramic.2004.11.020
10.1016/j.nimb.2007.12.058
10.1149/1.2408364
10.1016/S0168-583X(97)00182-1
10.1209/0295-5075/85/46001
10.1038/35084037
10.1306/D4267AB9-2B26-11D7-8648000102C1865D
10.1021/ac50009a001
10.1017/S1431927612005922
10.1002/app.1990.070391003
10.1038/srep03514
10.1088/0022-3727/46/19/195501
10.1021/nl801457b
10.1016/0168-583X(87)90004-8
10.1063/1.1337646
10.1016/j.mee.2010.11.041
10.1116/1.4800983
10.1007/978-1-4615-5361-8
10.1063/1.3702209
10.1116/1.3250204
10.1016/j.ultramic.2013.03.013
10.1063/1.4739240
10.1063/1.326679
10.1103/PhysRevB.14.2583
10.1088/0957-4484/21/45/455302
10.1002/sca.20262
10.1007/BF01329651
10.3762/bjnano.3.57
10.1021/nn900744z
10.1016/j.susc.2012.02.007
10.1103/PhysRevA.39.3836
10.1116/1.2955728
10.1088/0957-4484/22/17/175306
10.1016/j.ultramic.2012.11.005
10.1016/j.ultramic.2009.01.013
10.1103/PhysRevLett.109.265505
ContentType Journal Article
Copyright American Vacuum Society
Copyright_xml – notice: American Vacuum Society
DBID AAYXX
CITATION
DOI 10.1116/1.4863676
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
CrossRef
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Physics
EISSN 1520-8567
2166-2754
ExternalDocumentID 10_1116_1_4863676
GroupedDBID .DC
29L
5-Q
5GY
AAAAW
AAEUA
ABFTF
ABJNI
ACBRY
ADLOM
AENEX
AGTJO
AI.
ALMA_UNASSIGNED_HOLDINGS
ARCSS
BAUXJ
H~9
M43
M71
M73
RAW
RIP
RNS
ROL
RQS
VAS
VH1
WH7
XFK
AAGWI
AAPUP
AAYIH
AAYXX
ABJGX
ABNAN
ACGFS
ADMLS
AFHCQ
AGKCL
AGVCI
CITATION
EBS
EJD
ID FETCH-LOGICAL-c400t-d1d6e4f9c448b3bf25bba23af479740e07688844db350714ad533d77f2c35f1b3
ISSN 2166-2746
IngestDate Tue Jul 01 02:43:38 EDT 2025
Thu Apr 24 23:12:49 EDT 2025
Fri Jun 21 00:16:46 EDT 2024
Sun Jul 14 10:05:11 EDT 2019
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 2
Language English
License 2166-2746/2014/32(2)/020801/13/$30.00
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c400t-d1d6e4f9c448b3bf25bba23af479740e07688844db350714ad533d77f2c35f1b3
OpenAccessLink https://pubs.aip.org/avs/jvb/article-pdf/doi/10.1116/1.4863676/15781580/020801_1_online.pdf
PageCount 13
ParticipantIDs crossref_primary_10_1116_1_4863676
crossref_citationtrail_10_1116_1_4863676
scitation_primary_10_1116_1_4863676
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2014-03-01
PublicationDateYYYYMMDD 2014-03-01
PublicationDate_xml – month: 03
  year: 2014
  text: 2014-03-01
  day: 01
PublicationDecade 2010
PublicationTitle Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
PublicationYear 2014
References Behan, Zhou, Boese, Wang, Zhang (c43) 2012; 12
Ferrón, Alonso, Baragiola, Oliva-Florio (c37) 1981; 24
Boden, Franklin, Scipioni, Bagnall, Rutt (c68) 2012; 18
Veligura, Hlawacek, Berkelaar, van Gastel, Zandvliet, Poelsema (c129) 2013; 4
Fox, Zhou, O'Neill, Kumar, Wang, Coleman, Duesberg, Donegan, Zhang (c44) 2013; 24
van der Weg, Rol (c57) 1965; 38
Demers, Poirier-Demers, Couture, Joly, Guilmain, de Jonge, Drouin (c140) 2011; 33
Ramachandra, Griffin, Joy (c30) 2009; 109
Norarat, Marjomäki, Chen, Zhaohong, Minqin, Chen, Bettiol, Whitlow, Watt (c85) 2013; 306
Livengood, Tan, Greenzweig, Notte, McVey (c136) 2009; 27
Kucheyev, Toth, Phillips, Williams, Jagadish, Li (c78) 2001; 78
Chang (c108) 1975; 12
Sugahara (c77) 1998; 37
Kohama, Iijima, Hayashida, Ogawa (c119) 2013; 31
White (c58) 1978; 149
van Gastel (c45) 2011; 17
Ohya, Inai, Nisawa, Itoh (c34) 2008; 266
van Gastel, Hlawacek, Zandvliet, Poelsema (c74) 2012; 52
Filippelli, Delaney (c64) 1993; 63
Seah, Dench (c109) 1979; 1
Livengood, Tan, Hallstein, Notte, McVey, Rahman (c105) 2011; 645
Storm, Chen, Ling, Zandbergen, Dekker (c127) 2005; 98
Turchanin, Gölzhäuser (c95) 2012; 87
Pallon, Yang, Utui, Elfman, Malmqvist, Kristiansson, Sjöland (c61) 1997; 130
Notte (c106) 2012; 20
Alkemade, Chen, van Veldhoven, Maas (c120) 2010; 28
Ward, Notte, Economou (c17) 2006; 24
Utke, Hoffmann, Melngailis (c6) 2008; 26
Pitters, Urban, Vesa, Wolkow (c19) 2013; 131
Wirtz, Vanhove, Pillatsch, Dowsett, Sijbrandij, Notte (c139) 2012; 101
Kalbitzer (c18) 2004; 79
Ogawa, Iijima, Awata, Sugie, Kawasaki, Otsuka (c82) 2012; 18
Lehtinen, Kotakoski, Krasheninnikov, Tolvanen, Nordlund, Keinonen (c94) 2010; 81
Hanssen, Hill, Orloff, McClelland (c3) 2008; 8
Alkemade, Koster, van Veldhoven, Maas (c114) 2012; 34
Pearson, Boden, Bagnall, Lidzey, Rodenburg (c97) 2011; 11
Hlawacek, Veligura, Lorbek, Mocking, George, van Gastel, Zandvliet, Poelsema (c99) 2012; 3
Ohya, Yamanaka, Inai, Ishitani (c38) 2009; 267
Li, Stein, McMullan, Branton, Aziz, Golovchenko (c128) 2001; 412
Rahman, McVey, Farkas, Notte, Tan, Livengood (c104) 2012; 34
Orloff, Swanson (c12) 1975; 12
Ura, Aoyagi (c103) 2000; 49
Urban, Pitters, Wolkow (c21) 2012; 100
Thompson (c123) 1981; 69
Hill, Notte, Ward (c27) 2008; 1
Joens (c72) 2013; 3
Bischoff (c2) 2005; 103
Boden, Moktadir, Bagnall, Mizuta, Rutt (c133) 2011; 88
Hill, Rahman (c141) 2011; 645
Orloff, Swanson (c8) 1979; 50
Ji, Jiang, King, Leung, Standiford, Wilde (c4) 2002; 20
Rahman, Notte, Livengood, Tan (c23) 2013; 126
Notte (c28) 2007; 931
Sigmund (c122) 1987; 27
Luftig (c73) 1967; 20
Jepson, Inkson, Rodenburg, Bell (c102) 2009; 85
Knoll, Ruska (c7) 1932; 78
Ernst, Bozdech, Schmidt, Schmidt, Larkins (c26) 1993; 67
Lemme, Bell, Williams, Stern, Baugher, Jarillo-Herrero, Marcus (c86) 2009; 3
Pitters, Urban, Wolkow (c22) 2012; 136
Lehtinen, Kotakoski, Krasheninnikov, Keinonen (c92) 2011; 22
Kerkdijk, Thomas (c55) 1973; 63
Watt, Bettiol, Kan, Ynsa, Minqin, Rajendran, Huifang, Fwu-Shen, Jenner (c83) 2009; 267
Petrov, Vyvenko (c29) 2011; 8036
Riccardi, Barone, Bonanno, Oliva, Baragiola (c40) 2000; 84
Tolk, Tsong, White (c59) 1977; 49
Ålgren, Kotakoski, Lehtinen, Krasheninnikov (c93) 2012; 100
Lin, Joy (c36) 2005; 37
Williams, Song (c65) 1990; 51
Bell (c31) 2009; 15
Fowley, Diao, Faulkner, Kally, Ackland, Behan, Zhang, Deac, Coey (c125) 2013; 46
Buchholt, Eklund, Jensen, Lu, Spetz, Hultman (c42) 2011; 64
Hlawacek, Ahmad, Smithers, Kooij (c41) 2013; 135
Melngailis (c110) 1993; 80–81
Petrov, Vyvenko, Bondarenko (c39) 2010; 4
Melmed (c16) 1996; 94–95
Wang, Boden, Bagnall, Rutt, de Groot (c135) 2012; 23
Zhang, Miyamoto, Rubio (c91) 2012; 109
Escovitz, Fox, Levi-Setti (c11) 1975; 72
Nakaharai, Iijima, Ogawa, Suzuki, Li, Tsukagoshi, Sato, Yokoyama (c88) 2013; 7
Horiuchi, Itakura, Ishikawa (c14) 1988; 6
Behan, Feng, Zhang, Nirmalraj, Boland (c47) 2010; 28
Bazhin, Rausch, Thomas (c80) 1976; 14
Müller (c15) 1951; 131
Chen, van Veldhoven, Sanford, Salemink, Maas, Smith, Rack, Alkemade (c115) 2010; 21
George, Knez, Hlawacek, Hagedoorn, Verputten, van Gastel, ten Elshof (c100) 2012; 28
Bethe (c33) 1941; 59
Notte, Hill, McVey, Ramachandra, Griffin, Joy (c52) 2010; 16
Postek, Vladár, Archie, Ming (c69) 2011; 22
Wu (c107) 2013; 24
Yang, Ferranti, Stern, Sanford, Huang, Ren, Qin, Hall (c126) 2011; 22
Tondare (c1) 2005; 23
Arafah, Meyer, Sharabati, Mahmoud (c51) 1989; 39
Fox, Chen, Faulkner, Zhang (c130) 2012; 3
Sato (c10) 1992; 31
Baird, Zivitz, Thomas (c56) 1975; 12
Boden, Asadollahbaik, Rutt, Bagnall (c70) 2012; 34
Kishimoto, Ohshima, Hashimoto, Hayashi (c98) 1990; 39
Townsend (c76) 2012; 286
Bunch, Verbridge, Alden, van der Zande, Parpia, Craighead, McEuen (c89) 2008; 8
Urban, Wolkow, Pitters (c20) 2012; 122
Aguilar, Chandler, Townsends (c81) 1979; 40
Ritter (c96) 2013; 102
Scipioni, Sanford, Notte, Thompson, McVey (c32) 2009; 27
Itakura, Horiuchi, Yamamoto (c13) 1985; 3
Veligura, Hlawacek, van Gastel, Zandvliet, Poelsema (c46) 2012; 3
Smith, Fowlkes, Rack (c121) 2008; 19
Lucchese, Stavale, Ferreira, Vilani, Moutinho, Capaz, Achete, Jorio (c134) 2010; 48
Laakmann, Jung, Uelhoff (c137) 1987; 35
Hoffman (c63) 1971; 118
Sijbrandij, Notte, Scipioni, Huynh, Sanford (c48) 2010; 28
Mayer (c50) 1999; 541
Scipioni, Sanford, van Veldhoven, Maas (c116) 2011; 19
Rossi (c84) 2001; 181
Tan, Livengood, Shima, Notte, McVey (c132) 2010; 28
Winston (c111) 2009; 27
Townsend, Khanlary, Hole (c75) 2007; 201
Doherty, Manson, Delaney, Jelezko, Wrachtrup, Hollenberg (c66) 2013; 528
Marshall, Yang, Hall (c131) 2012; 34
Rajainmäki, Linderoth, Hansen, Nieminen, Bentzon (c138) 1988; 38
Horiuchi, Itakura, Ishikawa (c9) 1988; 6
Mocking, Hlawacek, Zandvliet (c101) 2012; 606
Sanford, Stern, Barriss, Farkas, DiManna, Mello, Maas, Alkemade (c118) 2009; 27
(2023070920122455800_c57) 1965; 38
Stepanova (2023070920122455800_c113) 2012
(2023070920122455800_c50) 1999; 541
(2023070920122455800_c5) 2003
(2023070920122455800_c104) 2012; 34
Jungmann (2023070920122455800_c67) 1997
(2023070920122455800_c128) 2001; 412
(2023070920122455800_c6) 2008; 26
(2023070920122455800_c3) 2008; 8
(2023070920122455800_c41) 2013; 135
(2023070920122455800_c90) 2008
(2023070920122455800_c89) 2008; 8
(2023070920122455800_c120) 2010; 28
(2023070920122455800_c44) 2013; 24
(2023070920122455800_c96) 2013; 102
(2023070920122455800_c93) 2012; 100
(2023070920122455800_c74) 2012; 52
(2023070920122455800_c97) 2011; 11
(2023070920122455800_c80) 1976; 14
(2023070920122455800_c25) 2009
(2023070920122455800_c28) 2007; 931
(2023070920122455800_c102) 2009; 85
(2023070920122455800_c86) 2009; 3
(2023070920122455800_c136) 2009; 27
(2023070920122455800_c22) 2012; 136
(2023070920122455800_c58) 1978; 149
(2023070920122455800_c107) 2013; 24
(2023070920122455800_c101) 2012; 606
(2023070920122455800_c29) 2011; 8036
(2023070920122455800_c125) 2013; 46
(2023070920122455800_c56) 1975; 12
(2023070920122455800_c45) 2011; 17
(2023070920122455800_c48) 2010; 28
(2023070920122455800_c72) 2013; 3
Gucsik (2023070920122455800_c54) 2009
2023070920122455800_c79
(2023070920122455800_c78) 2001; 78
(2023070920122455800_c118) 2009; 27
(2023070920122455800_c7) 1932; 78
(2023070920122455800_c23) 2013; 126
(2023070920122455800_c138) 1988; 38
(2023070920122455800_c69) 2011; 22
(2023070920122455800_c42) 2011; 64
(2023070920122455800_c68) 2012; 18
(2023070920122455800_c61) 1997; 130
(2023070920122455800_c114) 2012; 34
(2023070920122455800_c47) 2010; 28
(2023070920122455800_c73) 1967; 20
(2023070920122455800_c106) 2012; 20
(2023070920122455800_c87) 2010
(2023070920122455800_c99) 2012; 3
(2023070920122455800_c140) 2011; 33
Stepanova (2023070920122455800_c117) 2012
(2023070920122455800_c12) 1975; 12
(2023070920122455800_c17) 2006; 24
(2023070920122455800_c123) 1981; 69
(2023070920122455800_c70) 2012; 34
Baragiora (2023070920122455800_c35) 1985
(2023070920122455800_c40) 2000; 84
(2023070920122455800_c75) 2007; 201
(2023070920122455800_c134) 2010; 48
(2023070920122455800_c36) 2005; 37
(2023070920122455800_c95) 2012; 87
(2023070920122455800_c139) 2012; 101
Raymond (2023070920122455800_c112) 2010
(2023070920122455800_c127) 2005; 98
(2023070920122455800_c33) 1941; 59
(2023070920122455800_c11) 1975; 72
(2023070920122455800_c18) 2004; 79
(2023070920122455800_c103) 2000; 49
(2023070920122455800_c137) 1987; 35
(2023070920122455800_c24) 2003
(2023070920122455800_c126) 2011; 22
(2023070920122455800_c19) 2013; 131
(2023070920122455800_c131) 2012; 34
(2023070920122455800_c141) 2011; 645
(2023070920122455800_c109) 1979; 1
(2023070920122455800_c34) 2008; 266
(2023070920122455800_c77) 1998; 37
(2023070920122455800_c119) 2013; 31
(2023070920122455800_c53) 1979
(2023070920122455800_c84) 2001; 181
(2023070920122455800_c49) 2013
(2023070920122455800_c100) 2012; 28
(2023070920122455800_c129) 2013; 4
(2023070920122455800_c51) 1989; 39
(2023070920122455800_c71) 2010
(2023070920122455800_c13) 1985; 3
(2023070920122455800_c10) 1992; 31
(2023070920122455800_c82) 2012; 18
(2023070920122455800_c81) 1979; 40
(2023070920122455800_c63) 1971; 118
(2023070920122455800_c52) 2010; 16
Behrisch (2023070920122455800_c124) 2007
(2023070920122455800_c121) 2008; 19
(2023070920122455800_c92) 2011; 22
Kassing (2023070920122455800_c62) 1992
(2023070920122455800_c14) 1988; 6
(2023070920122455800_c94) 2010; 81
(2023070920122455800_c115) 2010; 21
(2023070920122455800_c59) 1977; 49
(2023070920122455800_c122) 1987; 27
(2023070920122455800_c4) 2002; 20
(2023070920122455800_c83) 2009; 267
(2023070920122455800_c15) 1951; 131
(2023070920122455800_c31) 2009; 15
(2023070920122455800_c26) 1993; 67
(2023070920122455800_c91) 2012; 109
(2023070920122455800_c111) 2009; 27
(2023070920122455800_c39) 2010; 4
(2023070920122455800_c116) 2011; 19
(2023070920122455800_c64) 1993; 63
(2023070920122455800_c2) 2005; 103
(2023070920122455800_c16) 1996; 94–95
(2023070920122455800_c108) 1975; 12
(2023070920122455800_c105) 2011; 645
(2023070920122455800_c88) 2013; 7
(2023070920122455800_c27) 2008; 1
(2023070920122455800_c110) 1993; 80–81
(2023070920122455800_c66) 2013; 528
(2023070920122455800_c21) 2012; 100
(2023070920122455800_c55) 1973; 63
(2023070920122455800_c133) 2011; 88
(2023070920122455800_c8) 1979; 50
(2023070920122455800_c76) 2012; 286
Vij (2023070920122455800_c60) 1998
(2023070920122455800_c85) 2013; 306
(2023070920122455800_c130) 2012; 3
(2023070920122455800_c9) 1988; 6
(2023070920122455800_c46) 2012; 3
(2023070920122455800_c20) 2012; 122
(2023070920122455800_c38) 2009; 267
(2023070920122455800_c32) 2009; 27
(2023070920122455800_c65) 1990; 51
(2023070920122455800_c135) 2012; 23
(2023070920122455800_c98) 1990; 39
(2023070920122455800_c37) 1981; 24
(2023070920122455800_c43) 2012; 12
(2023070920122455800_c1) 2005; 23
(2023070920122455800_c30) 2009; 109
(2023070920122455800_c132) 2010; 28
References_xml – volume: 15
  start-page: 147
  year: 2009
  ident: c31
  publication-title: Microsc. Microanal.
– volume: 12
  start-page: 1271
  year: 1975
  ident: c108
  publication-title: J. Vac. Sci. Technol.
– volume: 131
  start-page: 136
  year: 1951
  ident: c15
  publication-title: Zeitschrift für Phys.
– volume: 201
  start-page: 8160
  year: 2007
  ident: c75
  publication-title: Surf. Coat. Technol.
– volume: 23
  start-page: 395302
  year: 2012
  ident: c135
  publication-title: Nanotechnology
– volume: 100
  start-page: 263105
  year: 2012
  ident: c21
  publication-title: Appl. Phys. Lett.
– volume: 20
  start-page: 16
  year: 2012
  ident: c106
  publication-title: Microsc. Today
– volume: 31
  start-page: 031802
  year: 2013
  ident: c119
  publication-title: J. Vac. Sci. Technol. B
– volume: 135
  start-page: 89
  year: 2013
  ident: c41
  publication-title: Ultramicroscopy
– volume: 31
  start-page: L291
  year: 1992
  ident: c10
  publication-title: Jpn. J. Appl. Phys.
– volume: 49
  start-page: 16A
  year: 1977
  ident: c59
  publication-title: Anal. Chem.
– volume: 81
  start-page: 153401
  year: 2010
  ident: c94
  publication-title: Phys. Rev. B
– volume: 33
  start-page: 135
  year: 2011
  ident: c140
  publication-title: Scanning
– volume: 3
  start-page: 579
  year: 2012
  ident: c130
  publication-title: Beilstein J. Nanotechnol.
– volume: 51
  start-page: 679
  year: 1990
  ident: c65
  publication-title: J. Phys. Chem. Solids
– volume: 20
  start-page: 91
  year: 1967
  ident: c73
  publication-title: J. Ultrastruct. Res.
– volume: 14
  start-page: 2583
  year: 1976
  ident: c80
  publication-title: Phys. Rev. B
– volume: 12
  start-page: 876
  year: 1975
  ident: c56
  publication-title: Phys. Rev. A
– volume: 46
  start-page: 195501
  year: 2013
  ident: c125
  publication-title: J. Phys. D. Appl. Phys.
– volume: 16
  start-page: 599
  year: 2010
  ident: c52
  publication-title: Microsc. Microanal.
– volume: 126
  start-page: 10
  year: 2013
  ident: c23
  publication-title: Ultramicroscopy
– volume: 541
  start-page: 541
  year: 1999
  ident: c50
  publication-title: AIP Conf. Proc.
– volume: 78
  start-page: 318
  year: 1932
  ident: c7
  publication-title: Zeitschrift für Phys.
– volume: 11
  start-page: 4275
  year: 2011
  ident: c97
  publication-title: Nano Lett.
– volume: 28
  start-page: 73
  year: 2010
  ident: c48
  publication-title: J. Vac. Sci. Technol. B
– volume: 63
  start-page: 577
  year: 1973
  ident: c55
  publication-title: Physica
– volume: 8
  start-page: 2458
  year: 2008
  ident: c89
  publication-title: Nano Lett.
– volume: 98
  start-page: 014307
  year: 2005
  ident: c127
  publication-title: J. Appl. Phys.
– volume: 26
  start-page: 1197
  year: 2008
  ident: c6
  publication-title: J. Vac. Sci. Technol. B
– volume: 39
  start-page: 2055
  year: 1990
  ident: c98
  publication-title: J. Appl. Polym. Sci.
– volume: 109
  start-page: 265505
  year: 2012
  ident: c91
  publication-title: Phys. Rev. Lett.
– volume: 266
  start-page: 541
  year: 2008
  ident: c34
  publication-title: Nucl. Instrum. Meth. B
– volume: 606
  start-page: 924
  year: 2012
  ident: c101
  publication-title: Surf. Sci.
– volume: 27
  start-page: 3244
  year: 2009
  ident: c136
  publication-title: J. Vac. Sci. Technol. B
– volume: 18
  start-page: 814
  year: 2012
  ident: c82
  publication-title: Microsc. Microanal.
– volume: 22
  start-page: 024004
  year: 2011
  ident: c69
  publication-title: Meas. Sci. Technol.
– volume: 40
  start-page: 1
  year: 1979
  ident: c81
  publication-title: Radiat. Eff.
– volume: 27
  start-page: 2660
  year: 2009
  ident: c118
  publication-title: J. Vac. Sci. Technol. B
– volume: 103
  start-page: 59
  year: 2005
  ident: c2
  publication-title: Ultramicroscopy
– volume: 645
  start-page: 136
  year: 2011
  ident: c105
  publication-title: Nucl. Instrum. Meth. A
– volume: 12
  start-page: 1209
  year: 1975
  ident: c12
  publication-title: J. Vac. Sci. Technol.
– volume: 12
  start-page: 1094
  year: 2012
  ident: c43
  publication-title: J. Nanosci. Nanotechnol.
– volume: 48
  start-page: 1592
  year: 2010
  ident: c134
  publication-title: Carbon N. Y.
– volume: 267
  start-page: 584
  year: 2009
  ident: c38
  publication-title: Nucl. Instrum. Meth. B
– volume: 6
  start-page: 241
  year: 1988
  ident: c14
  publication-title: J. Vac. Sci. Technol. B
– volume: 6
  start-page: 937
  year: 1988
  ident: c9
  publication-title: J. Vac. Sci. Technol. B
– volume: 118
  start-page: 1508
  year: 1971
  ident: c63
  publication-title: J. Electrochem. Soc.
– volume: 28
  start-page: C6F22
  year: 2010
  ident: c120
  publication-title: J. Vac. Sci. Technol. B
– volume: 102
  start-page: 063112
  year: 2013
  ident: c96
  publication-title: Appl. Phys. Lett.
– volume: 645
  start-page: 96
  year: 2011
  ident: c141
  publication-title: Nucl. Instrum. Meth. A
– volume: 18
  start-page: 1253
  year: 2012
  ident: c68
  publication-title: Microsc. Microanal.
– volume: 1
  start-page: 135
  year: 2008
  ident: c27
  publication-title: Phys. Procedia
– volume: 84
  start-page: 378
  year: 2000
  ident: c40
  publication-title: Phys. Rev. Lett.
– volume: 78
  start-page: 34
  year: 2001
  ident: c78
  publication-title: Appl. Phys. Lett.
– volume: 412
  start-page: 166
  year: 2001
  ident: c128
  publication-title: Nature
– volume: 27
  start-page: 2702
  year: 2009
  ident: c111
  publication-title: J. Vac. Sci. Technol. B
– volume: 8
  start-page: 2844
  year: 2008
  ident: c3
  publication-title: Nano Lett.
– volume: 1
  start-page: 2
  year: 1979
  ident: c109
  publication-title: Surf. Interface Anal.
– volume: 85
  start-page: 46001
  year: 2009
  ident: c102
  publication-title: Europhys. Lett.
– volume: 19
  start-page: 415704
  year: 2008
  ident: c121
  publication-title: Nanotechnology
– volume: 69
  start-page: 335
  year: 1981
  ident: c123
  publication-title: Phys. Rep.
– volume: 34
  start-page: 101
  year: 2012
  ident: c131
  publication-title: Scanning
– volume: 23
  start-page: 1498
  year: 2005
  ident: c1
  publication-title: J. Vac. Sci. Technol. A
– volume: 24
  start-page: 175302
  year: 2013
  ident: c107
  publication-title: Nanotechnology
– volume: 38
  start-page: 1087
  year: 1988
  ident: c138
  publication-title: Phys. Rev. B
– volume: 20
  start-page: 2717
  year: 2002
  ident: c4
  publication-title: J. Vac. Sci. Technol. B
– volume: 52
  start-page: 2104
  year: 2012
  ident: c74
  publication-title: Microelectron. Reliab.
– volume: 122
  start-page: 60
  year: 2012
  ident: c20
  publication-title: Ultramicroscopy
– volume: 37
  start-page: 895
  year: 2005
  ident: c36
  publication-title: Surf. Interface Anal.
– volume: 64
  start-page: 1141
  year: 2011
  ident: c42
  publication-title: Scr. Mater.
– volume: 181
  start-page: 437
  year: 2001
  ident: c84
  publication-title: Nucl. Instrum. Meth. B
– volume: 24
  start-page: 335702
  year: 2013
  ident: c44
  publication-title: Nanotechnology
– volume: 39
  start-page: 3836
  year: 1989
  ident: c51
  publication-title: Phys. Rev. A
– volume: 100
  start-page: 233108
  year: 2012
  ident: c93
  publication-title: Appl. Phys. Lett.
– volume: 88
  start-page: 2452
  year: 2011
  ident: c133
  publication-title: Microelectron. Eng.
– volume: 931
  start-page: 489
  year: 2007
  ident: c28
  publication-title: AIP Conf. Proc.
– volume: 22
  start-page: 285310
  year: 2011
  ident: c126
  publication-title: Nanotechnology
– volume: 101
  start-page: 041601
  year: 2012
  ident: c139
  publication-title: Appl. Phys. Lett.
– volume: 24
  start-page: 4412
  year: 1981
  ident: c37
  publication-title: Phys. Rev. B
– volume: 87
  start-page: 108
  year: 2012
  ident: c95
  publication-title: Prog. Surf. Sci.
– volume: 3
  start-page: 507
  year: 2012
  ident: c99
  publication-title: Beilstein J. Nanotechnol.
– volume: 24
  start-page: 2871
  year: 2006
  ident: c17
  publication-title: J. Vac. Sci. Technol. B
– volume: 17
  start-page: 928
  year: 2011
  ident: c45
  publication-title: Microsc. Microanal.
– volume: 27
  start-page: 3250
  year: 2009
  ident: c32
  publication-title: J. Vac. Sci. Technol. B
– volume: 79
  start-page: 1901
  year: 2004
  ident: c18
  publication-title: Appl. Phys. A
– volume: 109
  start-page: 748
  year: 2009
  ident: c30
  publication-title: Ultramicroscopy
– volume: 130
  start-page: 199
  year: 1997
  ident: c61
  publication-title: Nucl. Instrum. Meth. B
– volume: 59
  start-page: 913
  year: 1941
  ident: c33
  publication-title: Phys. Rev.
– volume: 22
  start-page: 175306
  year: 2011
  ident: c92
  publication-title: Nanotechnology
– volume: 67
  start-page: 111
  year: 1993
  ident: c26
  publication-title: Appl. Surf. Sci.
– volume: 3
  start-page: 501
  year: 2012
  ident: c46
  publication-title: Beilstein J. Nanotechnol.
– volume: 136
  start-page: 154704
  year: 2012
  ident: c22
  publication-title: J. Chem. Phys.
– volume: 149
  start-page: 497
  year: 1978
  ident: c58
  publication-title: Nucl. Instrum. Meth.
– volume: 37
  start-page: L398
  year: 1998
  ident: c77
  publication-title: Jpn. J. Appl. Phys.
– volume: 94–95
  start-page: 17
  year: 1996
  ident: c16
  publication-title: Appl. Surf. Sci.
– volume: 306
  start-page: 113
  year: 2013
  ident: c85
  publication-title: Nucl. Instrum. Meth. B
– volume: 34
  start-page: 129
  year: 2012
  ident: c104
  publication-title: Scanning
– volume: 35
  start-page: 2063
  year: 1987
  ident: c137
  publication-title: Acta Metall.
– volume: 7
  start-page: 5694
  year: 2013
  ident: c88
  publication-title: ACS Nano
– volume: 3
  start-page: 3514
  year: 2013
  ident: c72
  publication-title: Sci. Rep.
– volume: 4
  start-page: 453
  year: 2013
  ident: c129
  publication-title: Beilstein J. Nanotechnol.
– volume: 38
  start-page: 274
  year: 1965
  ident: c57
  publication-title: Nucl. Instrum. Meth.
– volume: 19
  start-page: 22
  year: 2011
  ident: c116
  publication-title: Micros. Today
– volume: 131
  start-page: 56
  year: 2013
  ident: c19
  publication-title: Ultramicroscopy
– volume: 8036
  start-page: 80360O
  year: 2011
  ident: c29
  publication-title: Proc. SPIE
– volume: 49
  start-page: 157
  year: 2000
  ident: c103
  publication-title: J. Electron Microsc. (Tokyo)
– volume: 4
  start-page: 792
  year: 2010
  ident: c39
  publication-title: J. Surf. Investig.
– volume: 528
  start-page: 1
  year: 2013
  ident: c66
  publication-title: Phys. Rep.
– volume: 34
  start-page: 90
  year: 2012
  ident: c114
  publication-title: Scanning
– volume: 21
  start-page: 455302
  year: 2010
  ident: c115
  publication-title: Nanotechnology
– volume: 28
  start-page: 1377
  year: 2010
  ident: c47
  publication-title: J. Vac. Sci. Technol. A
– volume: 63
  start-page: 167
  year: 1993
  ident: c64
  publication-title: SEPM J. Sediment. Res.
– volume: 28
  start-page: C6F15
  year: 2010
  ident: c132
  publication-title: J. Vac. Sci. Technol. B
– volume: 80–81
  start-page: 1271
  year: 1993
  ident: c110
  publication-title: Nucl. Instrum. Meth. B
– volume: 34
  start-page: 107
  year: 2012
  ident: c70
  publication-title: Scanning
– volume: 50
  start-page: 6026
  year: 1979
  ident: c8
  publication-title: J. Appl. Phys.
– volume: 28
  start-page: 3045
  year: 2012
  ident: c100
  publication-title: Langmuir
– volume: 27
  start-page: 1
  year: 1987
  ident: c122
  publication-title: Nucl. Instrum. Meth. B
– volume: 267
  start-page: 2113
  year: 2009
  ident: c83
  publication-title: Nucl. Instrum. Meth. B
– volume: 3
  start-page: 153
  year: 1985
  ident: c13
  publication-title: Microelectron. Eng.
– volume: 286
  start-page: 35
  year: 2012
  ident: c76
  publication-title: Nucl. Instrum. Meth. B
– volume: 72
  start-page: 1826
  year: 1975
  ident: c11
  publication-title: Proc. Natl. Acad. Sci. U.S.A.
– volume: 3
  start-page: 2674
  year: 2009
  ident: c86
  publication-title: ACS Nano
– volume: 100
  start-page: 263105
  year: 2012
  ident: 2023070920122455800_c21
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.4726112
– volume-title: High Resolution Focused Ion Beams: FIB and Its Applications
  year: 2003
  ident: 2023070920122455800_c24
– volume: 6
  start-page: 241
  year: 1988
  ident: 2023070920122455800_c14
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.584014
– volume: 87
  start-page: 108
  year: 2012
  ident: 2023070920122455800_c95
  publication-title: Prog. Surf. Sci.
  doi: 10.1016/j.progsurf.2012.05.001
– volume-title: Geometrical Charged-Particle Optics
  year: 2009
  ident: 2023070920122455800_c25
– volume: 181
  start-page: 437
  year: 2001
  ident: 2023070920122455800_c84
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/S0168-583X(01)00465-7
– start-page: 351
  volume-title: Atomic Physics Methods in Modern Research
  year: 1997
  ident: 2023070920122455800_c67
  article-title: Excitons and radiation damage in alkali halides
  doi: 10.1007/BFb0104311
– volume: 34
  start-page: 107
  year: 2012
  ident: 2023070920122455800_c70
  publication-title: Scanning
  doi: 10.1002/sca.20267
– volume: 27
  start-page: 3244
  year: 2009
  ident: 2023070920122455800_c136
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3237101
– volume: 28
  start-page: 1377
  year: 2010
  ident: 2023070920122455800_c47
  publication-title: J. Vac. Sci. Technol. A
  doi: 10.1116/1.3502667
– volume: 528
  start-page: 1
  year: 2013
  ident: 2023070920122455800_c66
  publication-title: Phys. Rep.
  doi: 10.1016/j.physrep.2013.02.001
– volume: 4
  start-page: 792
  year: 2010
  ident: 2023070920122455800_c39
  publication-title: J. Surf. Investig.
  doi: 10.1134/S1027451010050186
– volume: 24
  start-page: 175302
  year: 2013
  ident: 2023070920122455800_c107
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/24/17/175302
– volume: 28
  start-page: C6F22
  year: 2010
  ident: 2023070920122455800_c120
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3517536
– volume: 23
  start-page: 395302
  year: 2012
  ident: 2023070920122455800_c135
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/23/39/395302
– volume: 306
  start-page: 113
  year: 2013
  ident: 2023070920122455800_c85
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/j.nimb.2012.12.052
– volume: 122
  start-page: 60
  year: 2012
  ident: 2023070920122455800_c20
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2012.07.026
– volume: 286
  start-page: 35
  year: 2012
  ident: 2023070920122455800_c76
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/j.nimb.2011.10.070
– volume: 69
  start-page: 335
  year: 1981
  ident: 2023070920122455800_c123
  publication-title: Phys. Rep.
  doi: 10.1016/0370-1573(81)90106-X
– volume: 18
  start-page: 1253
  year: 2012
  ident: 2023070920122455800_c68
  publication-title: Microsc. Microanal.
  doi: 10.1017/S1431927612013463
– volume: 17
  start-page: 928
  year: 2011
  ident: 2023070920122455800_c45
  publication-title: Microsc. Microanal.
  doi: 10.1017/S1431927611005514
– volume: 63
  start-page: 577
  year: 1973
  ident: 2023070920122455800_c55
  publication-title: Physica
  doi: 10.1016/0031-8914(73)90154-7
– volume: 12
  start-page: 1271
  year: 1975
  ident: 2023070920122455800_c108
  publication-title: J. Vac. Sci. Technol.
  doi: 10.1116/1.568515
– volume: 12
  start-page: 1094
  year: 2012
  ident: 2023070920122455800_c43
  publication-title: J. Nanosci. Nanotechnol.
  doi: 10.1166/jnn.2012.4260
– start-page: 275
  volume-title: in Nanofabrication: Techniques and Principles
  year: 2012
  ident: 2023070920122455800_c117
  article-title: Deposition, milling, and etching with a focused helium ion beam
  doi: 10.1007/978-3-7091-0424-8
– volume: 8
  start-page: 2844
  year: 2008
  ident: 2023070920122455800_c3
  publication-title: Nano Lett.
  doi: 10.1021/nl801472n
– volume: 20
  start-page: 2717
  year: 2002
  ident: 2023070920122455800_c4
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.1526694
– volume: 541
  start-page: 541
  year: 1999
  ident: 2023070920122455800_c50
  publication-title: AIP Conf. Proc.
  doi: 10.1063/1.59188
– volume: 16
  start-page: 599
  year: 2010
  ident: 2023070920122455800_c52
  publication-title: Microsc. Microanal.
  doi: 10.1017/S1431927610093682
– volume: 35
  start-page: 2063
  year: 1987
  ident: 2023070920122455800_c137
  publication-title: Acta Metall.
  doi: 10.1016/0001-6160(87)90034-4
– volume: 12
  start-page: 876
  year: 1975
  ident: 2023070920122455800_c56
  publication-title: Phys. Rev. A
  doi: 10.1103/PhysRevA.12.876
– volume: 19
  start-page: 415704
  year: 2008
  ident: 2023070920122455800_c121
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/19/41/415704
– volume-title: Microscopic Microanalysis
  year: 2010
  ident: 2023070920122455800_c71
  article-title: Helium ion microscopy of microstructures and biological samples
– volume: 51
  start-page: 679
  year: 1990
  ident: 2023070920122455800_c65
  publication-title: J. Phys. Chem. Solids
  doi: 10.1016/0022-3697(90)90144-5
– volume: 31
  start-page: L291
  year: 1992
  ident: 2023070920122455800_c10
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.31.L291
– volume: 645
  start-page: 136
  year: 2011
  ident: 2023070920122455800_c105
  publication-title: Nucl. Instrum. Meth. A
  doi: 10.1016/j.nima.2010.12.220
– volume: 931
  start-page: 489
  year: 2007
  ident: 2023070920122455800_c28
  publication-title: AIP Conf. Proc.
  doi: 10.1063/1.2799423
– volume: 135
  start-page: 89
  year: 2013
  ident: 2023070920122455800_c41
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2013.07.010
– volume: 20
  start-page: 16
  year: 2012
  ident: 2023070920122455800_c106
  publication-title: Microsc. Today
  doi: 10.1017/S1551929512000715
– volume: 40
  start-page: 1
  year: 1979
  ident: 2023070920122455800_c81
  publication-title: Radiat. Eff.
  doi: 10.1080/00337577908234484
– volume-title: Bulletin of the American Physical Society
  year: 2010
  ident: 2023070920122455800_c87
  article-title: Graphene nanoribbons fabricated by helium ion microscope
– volume: 645
  start-page: 96
  year: 2011
  ident: 2023070920122455800_c141
  publication-title: Nucl. Instrum. Meth. A
  doi: 10.1016/j.nima.2010.12.123
– volume: 67
  start-page: 111
  year: 1993
  ident: 2023070920122455800_c26
  publication-title: Appl. Surf. Sci.
  doi: 10.1016/0169-4332(93)90301-Q
– volume: 28
  start-page: 3045
  year: 2012
  ident: 2023070920122455800_c100
  publication-title: Langmuir
  doi: 10.1021/la204437r
– volume: 102
  start-page: 063112
  year: 2013
  ident: 2023070920122455800_c96
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.4792511
– volume: 24
  start-page: 335702
  year: 2013
  ident: 2023070920122455800_c44
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/24/33/335702
– volume: 37
  start-page: 895
  year: 2005
  ident: 2023070920122455800_c36
  publication-title: Surf. Interface Anal.
  doi: 10.1002/sia.2107
– volume: 3
  start-page: 507
  year: 2012
  ident: 2023070920122455800_c99
  publication-title: Beilstein J. Nanotechnol.
  doi: 10.3762/bjnano.3.58
– volume: 98
  start-page: 014307
  year: 2005
  ident: 2023070920122455800_c127
  publication-title: J. Appl. Phys.
  doi: 10.1063/1.1947391
– volume: 4
  start-page: 453
  year: 2013
  ident: 2023070920122455800_c129
  publication-title: Beilstein J. Nanotechnol.
  doi: 10.3762/bjnano.4.53
– volume: 28
  start-page: 73
  year: 2010
  ident: 2023070920122455800_c48
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3271254
– volume: 149
  start-page: 497
  year: 1978
  ident: 2023070920122455800_c58
  publication-title: Nucl. Instrum. Meth.
  doi: 10.1016/0029-554X(78)90916-3
– volume: 1
  start-page: 2
  year: 1979
  ident: 2023070920122455800_c109
  publication-title: Surf. Interface Anal.
  doi: 10.1002/sia.740010103
– volume: 24
  start-page: 2871
  year: 2006
  ident: 2023070920122455800_c17
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.2357967
– volume: 8036
  start-page: 80360O
  year: 2011
  ident: 2023070920122455800_c29
  publication-title: Proc. SPIE
  doi: 10.1117/12.886347
– volume: 79
  start-page: 1901
  year: 2004
  ident: 2023070920122455800_c18
  publication-title: Appl. Phys. A
  doi: 10.1007/s00339-004-2869-6
– volume: 27
  start-page: 2660
  year: 2009
  ident: 2023070920122455800_c118
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3237095
– volume-title: Sputtering by Particle Bombardment, Topics in Applied Physics
  year: 2007
  ident: 2023070920122455800_c124
– volume: 1
  start-page: 135
  year: 2008
  ident: 2023070920122455800_c27
  publication-title: Phys. Procedia
  doi: 10.1016/j.phpro.2008.07.088
– volume: 37
  start-page: L398
  year: 1998
  ident: 2023070920122455800_c77
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.37.L398
– volume: 34
  start-page: 101
  year: 2012
  ident: 2023070920122455800_c131
  publication-title: Scanning
  doi: 10.1002/sca.21003
– volume: 34
  start-page: 129
  year: 2012
  ident: 2023070920122455800_c104
  publication-title: Scanning
  doi: 10.1002/sca.20268
– volume: 20
  start-page: 91
  year: 1967
  ident: 2023070920122455800_c73
  publication-title: J. Ultrastruct. Res.
  doi: 10.1016/S0022-5320(67)80038-8
– volume-title: IOP Conference Series: Material Science and Engineering
  year: 2013
  ident: 2023070920122455800_c49
  article-title: Backscattered helium spectroscopy in the helium ion microscope: Principles, resolution and applications
– volume: 38
  start-page: 274
  year: 1965
  ident: 2023070920122455800_c57
  publication-title: Nucl. Instrum. Meth.
  doi: 10.1016/0029-554X(65)90154-0
– volume: 100
  start-page: 233108
  year: 2012
  ident: 2023070920122455800_c93
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.4726053
– volume: 15
  start-page: 147
  year: 2009
  ident: 2023070920122455800_c31
  publication-title: Microsc. Microanal.
  doi: 10.1017/S1431927609090138
– ident: 2023070920122455800_c79
  article-title: High resolution ionoluminescence study of defect creation and interaction
– volume-title: the Stopping and Range of Ions in Matter
  year: 2008
  ident: 2023070920122455800_c90
– volume: 78
  start-page: 318
  year: 1932
  ident: 2023070920122455800_c7
  publication-title: Zeitschrift für Phys.
  doi: 10.1007/BF01342199
– volume: 19
  start-page: 22
  year: 2011
  ident: 2023070920122455800_c116
  publication-title: Micros. Today
  doi: 10.1017/S1551929511000307
– volume: 12
  start-page: 1209
  year: 1975
  ident: 2023070920122455800_c12
  publication-title: J. Vac. Sci. Technol.
  doi: 10.1116/1.568497
– volume: 38
  start-page: 1087
  year: 1988
  ident: 2023070920122455800_c138
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.38.1087
– volume: 52
  start-page: 2104
  year: 2012
  ident: 2023070920122455800_c74
  publication-title: Microelectron. Reliab.
  doi: 10.1016/j.microrel.2012.06.130
– volume: 81
  start-page: 153401
  year: 2010
  ident: 2023070920122455800_c94
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.81.153401
– volume: 11
  start-page: 4275
  year: 2011
  ident: 2023070920122455800_c97
  publication-title: Nano Lett.
  doi: 10.1021/nl202269n
– start-page: 93
  volume-title: Nanofabrication: Techniques and Principles
  year: 2012
  ident: 2023070920122455800_c113
  doi: 10.1007/978-3-7091-0424-8
– volume: 59
  start-page: 913
  year: 1941
  ident: 2023070920122455800_c33
  publication-title: Phys. Rev.
  doi: 10.1103/PhysRev.59.913
– volume: 3
  start-page: 579
  year: 2012
  ident: 2023070920122455800_c130
  publication-title: Beilstein J. Nanotechnol.
  doi: 10.3762/bjnano.3.67
– volume: 3
  start-page: 153
  year: 1985
  ident: 2023070920122455800_c13
  publication-title: Microelectron. Eng.
  doi: 10.1016/0167-9317(85)90022-X
– volume: 267
  start-page: 2113
  year: 2009
  ident: 2023070920122455800_c83
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/j.nimb.2009.03.069
– volume: 34
  start-page: 90
  year: 2012
  ident: 2023070920122455800_c114
  publication-title: Scanning
  doi: 10.1002/sca.21009
– volume: 22
  start-page: 285310
  year: 2011
  ident: 2023070920122455800_c126
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/22/28/285310
– volume: 84
  start-page: 378
  year: 2000
  ident: 2023070920122455800_c40
  publication-title: Phys. Rev. Lett.
  doi: 10.1103/PhysRevLett.84.378
– volume: 64
  start-page: 1141
  year: 2011
  ident: 2023070920122455800_c42
  publication-title: Scr. Mater.
  doi: 10.1016/j.scriptamat.2011.03.013
– volume: 48
  start-page: 1592
  year: 2010
  ident: 2023070920122455800_c134
  publication-title: Carbon N. Y.
  doi: 10.1016/j.carbon.2009.12.057
– volume: 94–95
  start-page: 17
  year: 1996
  ident: 2023070920122455800_c16
  publication-title: Appl. Surf. Sci.
  doi: 10.1016/0169-4332(95)00351-7
– start-page: 141
  volume-title: Spectroscopy, Luminescence and Radiation Centers in Minerals
  year: 1979
  ident: 2023070920122455800_c53
  article-title: Luminescence
  doi: 10.1007/978-3-642-67112-8_5
– volume: 23
  start-page: 1498
  year: 2005
  ident: 2023070920122455800_c1
  publication-title: J. Vac. Sci. Technol. A
  doi: 10.1116/1.2101792
– volume: 7
  start-page: 5694
  year: 2013
  ident: 2023070920122455800_c88
  publication-title: ACS Nano
  doi: 10.1021/nn401992q
– start-page: 1
  volume-title: Cathodoluminescence and Its Application in the Planetary Sciences
  year: 2009
  ident: 2023070920122455800_c54
  article-title: Physical principles of cathodoluminescence (CL) and its applications in geosciences
  doi: 10.1007/978-3-540-87529-1
– volume: 201
  start-page: 8160
  year: 2007
  ident: 2023070920122455800_c75
  publication-title: Surf. Coat. Technol.
  doi: 10.1016/j.surfcoat.2006.01.075
– start-page: 1
  volume-title: Lehrbuch der Experimentalphysik
  year: 1992
  ident: 2023070920122455800_c62
  article-title: Grundlagen der Festkörperphysik
– volume: 28
  start-page: C6F15
  year: 2010
  ident: 2023070920122455800_c132
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3511509
– volume: 27
  start-page: 3250
  year: 2009
  ident: 2023070920122455800_c32
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3258634
– volume: 24
  start-page: 4412
  year: 1981
  ident: 2023070920122455800_c37
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.24.4412
– volume: 22
  start-page: 024004
  year: 2011
  ident: 2023070920122455800_c69
  publication-title: Meas. Sci. Technol.
  doi: 10.1088/0957-0233/22/2/024004
– volume: 6
  start-page: 937
  year: 1988
  ident: 2023070920122455800_c9
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.584328
– volume: 72
  start-page: 1826
  year: 1975
  ident: 2023070920122455800_c11
  publication-title: Proc. Natl. Acad. Sci. U.S.A.
  doi: 10.1073/pnas.72.5.1826
– volume: 49
  start-page: 157
  year: 2000
  ident: 2023070920122455800_c103
  publication-title: J. Electron Microsc. (Tokyo)
  doi: 10.1093/oxfordjournals.jmicro.a023780
– volume: 267
  start-page: 584
  year: 2009
  ident: 2023070920122455800_c38
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/j.nimb.2008.11.003
– volume: 80–81
  start-page: 1271
  year: 1993
  ident: 2023070920122455800_c110
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/0168-583X(93)90781-Z
– volume: 103
  start-page: 59
  year: 2005
  ident: 2023070920122455800_c2
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2004.11.020
– start-page: 763814
  volume-title: Metrology, Inspection, and Process Control for Microlithography XXIV
  year: 2010
  ident: 2023070920122455800_c112
  article-title: Nanofabrication with a helium ion microscope
– volume: 266
  start-page: 541
  year: 2008
  ident: 2023070920122455800_c34
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/j.nimb.2007.12.058
– volume: 118
  start-page: 1508
  year: 1971
  ident: 2023070920122455800_c63
  publication-title: J. Electrochem. Soc.
  doi: 10.1149/1.2408364
– volume: 130
  start-page: 199
  year: 1997
  ident: 2023070920122455800_c61
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/S0168-583X(97)00182-1
– volume: 85
  start-page: 46001
  year: 2009
  ident: 2023070920122455800_c102
  publication-title: Europhys. Lett.
  doi: 10.1209/0295-5075/85/46001
– volume: 412
  start-page: 166
  year: 2001
  ident: 2023070920122455800_c128
  publication-title: Nature
  doi: 10.1038/35084037
– volume: 63
  start-page: 167
  year: 1993
  ident: 2023070920122455800_c64
  publication-title: SEPM J. Sediment. Res.
  doi: 10.1306/D4267AB9-2B26-11D7-8648000102C1865D
– volume: 49
  start-page: 16A
  year: 1977
  ident: 2023070920122455800_c59
  publication-title: Anal. Chem.
  doi: 10.1021/ac50009a001
– volume: 18
  start-page: 814
  year: 2012
  ident: 2023070920122455800_c82
  publication-title: Microsc. Microanal.
  doi: 10.1017/S1431927612005922
– volume: 39
  start-page: 2055
  year: 1990
  ident: 2023070920122455800_c98
  publication-title: J. Appl. Polym. Sci.
  doi: 10.1002/app.1990.070391003
– volume: 3
  start-page: 3514
  year: 2013
  ident: 2023070920122455800_c72
  publication-title: Sci. Rep.
  doi: 10.1038/srep03514
– volume-title: Scanning Electron Microscopy and X-ray Microanalysis
  year: 2003
  ident: 2023070920122455800_c5
– volume: 46
  start-page: 195501
  year: 2013
  ident: 2023070920122455800_c125
  publication-title: J. Phys. D. Appl. Phys.
  doi: 10.1088/0022-3727/46/19/195501
– volume: 8
  start-page: 2458
  year: 2008
  ident: 2023070920122455800_c89
  publication-title: Nano Lett.
  doi: 10.1021/nl801457b
– start-page: 27
  volume-title: Ionization of Solids by Heavy Particles
  year: 1985
  ident: 2023070920122455800_c35
  article-title: Theory of ion–induced kinetic electron emission from solids
– volume: 27
  start-page: 1
  year: 1987
  ident: 2023070920122455800_c122
  publication-title: Nucl. Instrum. Meth. B
  doi: 10.1016/0168-583X(87)90004-8
– volume: 78
  start-page: 34
  year: 2001
  ident: 2023070920122455800_c78
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.1337646
– volume: 88
  start-page: 2452
  year: 2011
  ident: 2023070920122455800_c133
  publication-title: Microelectron. Eng.
  doi: 10.1016/j.mee.2010.11.041
– volume: 31
  start-page: 031802
  year: 2013
  ident: 2023070920122455800_c119
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.4800983
– start-page: 189
  volume-title: Luminescence of Solids
  year: 1998
  ident: 2023070920122455800_c60
  article-title: Ionoluminescence
  doi: 10.1007/978-1-4615-5361-8
– volume: 136
  start-page: 154704
  year: 2012
  ident: 2023070920122455800_c22
  publication-title: J. Chem. Phys.
  doi: 10.1063/1.3702209
– volume: 27
  start-page: 2702
  year: 2009
  ident: 2023070920122455800_c111
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.3250204
– volume: 131
  start-page: 56
  year: 2013
  ident: 2023070920122455800_c19
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2013.03.013
– volume: 101
  start-page: 041601
  year: 2012
  ident: 2023070920122455800_c139
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.4739240
– volume: 50
  start-page: 6026
  year: 1979
  ident: 2023070920122455800_c8
  publication-title: J. Appl. Phys.
  doi: 10.1063/1.326679
– volume: 14
  start-page: 2583
  year: 1976
  ident: 2023070920122455800_c80
  publication-title: Phys. Rev. B
  doi: 10.1103/PhysRevB.14.2583
– volume: 21
  start-page: 455302
  year: 2010
  ident: 2023070920122455800_c115
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/21/45/455302
– volume: 33
  start-page: 135
  year: 2011
  ident: 2023070920122455800_c140
  publication-title: Scanning
  doi: 10.1002/sca.20262
– volume: 131
  start-page: 136
  year: 1951
  ident: 2023070920122455800_c15
  publication-title: Zeitschrift für Phys.
  doi: 10.1007/BF01329651
– volume: 3
  start-page: 501
  year: 2012
  ident: 2023070920122455800_c46
  publication-title: Beilstein J. Nanotechnol.
  doi: 10.3762/bjnano.3.57
– volume: 3
  start-page: 2674
  year: 2009
  ident: 2023070920122455800_c86
  publication-title: ACS Nano
  doi: 10.1021/nn900744z
– volume: 606
  start-page: 924
  year: 2012
  ident: 2023070920122455800_c101
  publication-title: Surf. Sci.
  doi: 10.1016/j.susc.2012.02.007
– volume: 39
  start-page: 3836
  year: 1989
  ident: 2023070920122455800_c51
  publication-title: Phys. Rev. A
  doi: 10.1103/PhysRevA.39.3836
– volume: 26
  start-page: 1197
  year: 2008
  ident: 2023070920122455800_c6
  publication-title: J. Vac. Sci. Technol. B
  doi: 10.1116/1.2955728
– volume: 22
  start-page: 175306
  year: 2011
  ident: 2023070920122455800_c92
  publication-title: Nanotechnology
  doi: 10.1088/0957-4484/22/17/175306
– volume: 126
  start-page: 10
  year: 2013
  ident: 2023070920122455800_c23
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2012.11.005
– volume: 109
  start-page: 748
  year: 2009
  ident: 2023070920122455800_c30
  publication-title: Ultramicroscopy
  doi: 10.1016/j.ultramic.2009.01.013
– volume: 109
  start-page: 265505
  year: 2012
  ident: 2023070920122455800_c91
  publication-title: Phys. Rev. Lett.
  doi: 10.1103/PhysRevLett.109.265505
SSID ssj0000685030
ssj0006533
Score 2.523179
Snippet Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution microscopy and nanofabrication technique. It is an enabling...
SourceID crossref
scitation
SourceType Enrichment Source
Index Database
Publisher
Title Helium ion microscopy
URI http://dx.doi.org/10.1116/1.4863676
Volume 32
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR3JSsNAdHA5qAdxqbhT1INQUrPMJOnRvYiKaCvewiwJFNtGuij49b5JJjNt7aF6CWEyk2TyXt6-IHTiCM_lHhZWjRBqYeZTiwaUS3chS1hApHNQRls8-vUmvnsjbxPZJQNW5d9T80r-A1UYA7jKLNk_QFbfFAbgHOALR4AwHGeCMfCM1rBTkRDsyMA6mWIy5qYdETc_KR_C3CKNJwuc1Gb1auVCkdrUDGZYkd3X9MrREni9Tb8oj99Nnktx5VUGOQ-z9kWVV9pvtVt9TfplstQtBcTKDM_PNDVhiU-p5NKdvBN0rJz9yhzhYBOPlVMt1_F9C1RdVd96dCyvFl2QXWPWLLTfKdQ8MyxUcejLwnKGZRVu-glOpuMLc83Gj5xILZ1Hiy7oEUC5F8-vHu5ftBnO9kNiZx1p9Iur-lOw_kw_ekxqWQJQ5XESI6JIYw2tKqCWz3OEWEdzcXcDrYxUltxEpRw1yrC6bFCjhJo3143LuqU6YFgcaOvAEo7wY5zUOCjRzGOJSxijrkcTHIAeaMfSjRqGGAvmSbkeUwHSuwiCBP4_kjjM20IL3bQbb6MySzC3BfA_wQJMOGcObBiUAwI_Kq_Z4Q46LXYYFduTXUra0a-PuYOO9NSPvCbKtEnH-jP9cdZn2jMzog-R7M7ywD20bPBxHy0MesP4AATGATtUQP8BM3Jn7A
linkProvider EBSCOhost
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Helium+ion+microscopy&rft.jtitle=Journal+of+vacuum+science+and+technology.+B%2C+Nanotechnology+%26+microelectronics&rft.au=Hlawacek%2C+Gregor&rft.au=Veligura%2C+Vasilisa&rft.au=van+Gastel%2C+Raoul&rft.au=Poelsema%2C+Bene&rft.date=2014-03-01&rft.issn=2166-2746&rft.eissn=2166-2754&rft.volume=32&rft.issue=2&rft_id=info:doi/10.1116%2F1.4863676&rft.externalDBID=n%2Fa&rft.externalDocID=10_1116_1_4863676
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2166-2746&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2166-2746&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2166-2746&client=summon