X-ray photoelectron spectroscopy study of Al- and N- co-doped p-type ZnO thin films

• Published in: Journal of crystal growth Vol. 311; no. 8; pp. 2341 - 2344
• Main Authors: Yuan, G.D., Ye, Z.Z., Huang, J.Y., Zhu, Z.P., Perkins, C.L., Zhang, S.B.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.04.2009; Elsevier
• Subjects: A1. Electrical properties; A1. X-ray photoelectron spectroscopy; A1. ZnO; Al- and N- co-doping; ALUMINIUM; AMMONIA; BEHAVIOR; BINDING ENERGY; BONDING; CHEMICAL STATE; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Condensed matter: structure, mechanical and thermal properties; Crystalline state (including molecular motions in solids); DOPED MATERIALS; Exact sciences and technology; NITROGEN; OXYGEN; PEAKS; Physics; SOLAR ENERGY; Solar Energy - Photovoltaics; Structure of solids and liquids; crystallography; SYMMETRY; Theory of crystal structure, crystal symmetry; calculations and modeling; THIN FILMS; X-RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC OXIDES; 78.55.Et; A1. Electrical properties; A1. ZnO; 81.15.Hi; A1. X-ray photoelectron spectroscopy; Al- and N- co-doping; Symmetry property; Electrical properties; Doping; Aluminium nitride; Aluminium; Phosphorus additions; Zinc; Thin films; Ammonia; Binding energy; Aluminium additions; 81.15.Hi A1. Electrical properties; Zinc oxide; Nitrogen additions; A1. P-type conduction; Bonding; X-ray photoelectron spectra
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2009.01.128

The chemical state of nitrogen, aluminum, oxygen and zinc in Al–N co-doped p-type ZnO thin films was investigated by X-ray photoelectron spectroscopy (XPS). N 1s peak were detected in both the two p-type ZnO thin films, showing two components. The higher binding energy peak may be due to the Al–N O–H species, and the lower one perhaps derive from the (NH 2) − cluster for the ammonia introduction. These two peaks both contribute to the p-type behavior in the ZnO films. A symmetry 74.4 eV binding energy in Al 2p3/2 photoelectron peaks revealed an Al–N bonding state, a key factor to the co-doping method.