Characterization of polished surfaces by “Makyoh”

• Published in: Journal of crystal growth Vol. 103; no. 1; pp. 461 - 468
• Main Author: Kugimiya, K.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.06.1990; Elsevier
• Subjects: Condensed matter: structure, mechanical and thermal properties; Exact sciences and technology; Physics; Solid surfaces and solid-solid interfaces; Surface structure and topography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/0022-0248(90)90227-C

Characterization by “Makyoh”, the magic mirror metho, has been proven to be very effective in detecting various flaws on mirror surfaces and also in controling mirror fabrication processes: state-of-the-art processes. Makyoh, a many-centuries-old simple concept, offers a very simple and non-destructive surface analyzing method which transforms latent damages, scratches, waviness and other flaws on mirror-like surfaces into visual images. It has a sensitivity of picking up undulations of an order of a few nm over a half mm span and is the most suitable method to characterize highly finished mirror-like surfaces with the extreme perfection of large areas, i.e. mirror-polished Si wafers for ULSI, hard discs, liquid crystal display glasses and other substrates. The Makyoh method has replaced the laborious and unstable naked-eye wafer inspection lines. It has also been proved to be effective in monitoring wafer processes like thermal and epitaxial processes.