Characterization of polished surfaces by “Makyoh”
Characterization by “Makyoh”, the magic mirror metho, has been proven to be very effective in detecting various flaws on mirror surfaces and also in controling mirror fabrication processes: state-of-the-art processes. Makyoh, a many-centuries-old simple concept, offers a very simple and non-destruct...
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Published in | Journal of crystal growth Vol. 103; no. 1; pp. 461 - 468 |
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Main Author | |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.06.1990
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | Characterization by “Makyoh”, the magic mirror metho, has been proven to be very effective in detecting various flaws on mirror surfaces and also in controling mirror fabrication processes: state-of-the-art processes. Makyoh, a many-centuries-old simple concept, offers a very simple and non-destructive surface analyzing method which transforms latent damages, scratches, waviness and other flaws on mirror-like surfaces into visual images. It has a sensitivity of picking up undulations of an order of a few nm over a half mm span and is the most suitable method to characterize highly finished mirror-like surfaces with the extreme perfection of large areas, i.e. mirror-polished Si wafers for ULSI, hard discs, liquid crystal display glasses and other substrates. The Makyoh method has replaced the laborious and unstable naked-eye wafer inspection lines. It has also been proved to be effective in monitoring wafer processes like thermal and epitaxial processes. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/0022-0248(90)90227-C |