Intercomparison of scanning probe microscopes

• Published in: Precision engineering Vol. 26; no. 3; pp. 296 - 305
• Main Authors: Breil, R, Fries, T, Garnaes, J, Haycocks, J, Hüser, D, Joergensen, J, Kautek, W, Koenders, L, Kofod, N, Koops, K.R, Korntner, R, Lindner, B, Mirandé, W, Neubauer, A, Peltonen, J, Picotto, G.B, Pisani, M, Rothe, H, Sahre, M, Stedman, M, Wilkening, G
• Format: Journal Article
• Language: English
• Published: New York, NY Elsevier Inc 01.07.2002; Elsevier Science
• Subjects: Applied sciences; Calibration; Calibration artifacts; Comparison measurements; Exact sciences and technology; Industrial metrology. Testing; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Optical microscopy; Physics; Probes; Quantitative microscopy; Scanning probe microscopes, components and techniques; Scanning probe microscopy; Comparison measurements; Calibration; Scanning probe microscopy; Calibration artifacts; Quantitative microscopy; Measurement; Scanning microscope; Dimensional control; Two dimensional model; Comparative study; Quantitative analysis
• ISSN: 0141-6359; 1873-2372
• DOI: 10.1016/S0141-6359(02)00114-9

Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported.