Phase composition and microstructure of polycrystalline and epitaxial TaNx layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition
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Published in | Thin solid films Vol. 402; no. 1-2; pp. 172 - 182 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
2002
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Subjects | |
Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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DOI: | 10.1016/s0040-6090(01)01618-2 |