Determination of structure factors, lattice strains and accelerating voltage by energy-filtered convergent beam electron diffraction

• Published in: Ultramicroscopy Vol. 54; no. 1; pp. 15 - 30
• Main Authors: Deininger, C., Necker, G., Mayer, J.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.1994; Elsevier Science
• Subjects: Electron, positron and ion microscopes, electron diffractometers and related techniques; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Physics; Scanning probe microscopes, components, and techniques; Filtering; Structure factors; Electron diffraction; Instrumentation; Experimental study; Electron microscopy; Convergent beam method; Lattice parameters; Accelerating voltage; Transmission electron microscopy; Energy; Strains; Lattice structure
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/0304-3991(94)90089-2

Transmission electron microscopes with integrated imaging energy filters make it possible to acquire two-dimensional energy-filtered convergent beam electron diffraction patterns. Zero-loss filtered diffraction patterns can be compared quantitatively with computer simulations and by this the underlying crystallographic parameters can be determined. High-index reflections are used to measure lattice strain with high accuracy and also to determine the accelerating voltage. Low-index reflections are used to measure structure factors. For structure factor determination, we have modified the refinement method of Zuo and Spence [Ultramicroscopy 35 (1991) 185] to include a global optimization algorithm which is a variant of the simulated annealing procedure.