Evaluation of a new plasma source for molecular beam epitaxial growth of InN and GaN films
An RF plasma source has been integrated into a molecular beam epitaxial system for growth of nitride films. Using an optical detector on the source, the presence of nitrogen atoms in the N 2 plasma region is deduced as a function of operating conditions. The plasma source has been used to grow hexag...
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Published in | Journal of crystal growth Vol. 111; no. 1; pp. 1024 - 1028 |
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Main Authors | , , |
Format | Journal Article Conference Proceeding |
Language | English |
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Amsterdam
Elsevier B.V
01.05.1991
Elsevier |
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Abstract | An RF plasma source has been integrated into a molecular beam epitaxial system for growth of nitride films. Using an optical detector on the source, the presence of nitrogen atoms in the N
2 plasma region is deduced as a function of operating conditions. The plasma source has been used to grow hexagonal wurtzite films of InN and GaN. The film-substrate interface is more abrupt for GaN than InN films. For site competition the active nitrogen species from the plasma is found to incorporate more readily than As
2. |
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AbstractList | An RF plasma source has been integrated into a molecular beam epitaxial system for growth of nitride films. Using an optical detector on the source, the presence of nitrogen atoms in the N
2 plasma region is deduced as a function of operating conditions. The plasma source has been used to grow hexagonal wurtzite films of InN and GaN. The film-substrate interface is more abrupt for GaN than InN films. For site competition the active nitrogen species from the plasma is found to incorporate more readily than As
2. |
Author | Lemonias, P.J. Hoke, W.E. Weir, D.G. |
Author_xml | – sequence: 1 givenname: W.E. surname: Hoke fullname: Hoke, W.E. – sequence: 2 givenname: P.J. surname: Lemonias fullname: Lemonias, P.J. – sequence: 3 givenname: D.G. surname: Weir fullname: Weir, D.G. |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=4397827$$DView record in Pascal Francis |
BookMark | eNp9kD1PwzAQhi0EEm3hHzB4YIAhYDsfjhckVJVSqSpLWVisq-OAkWNHdtrCvyehqCPTDfc-d3reMTp13mmErii5o4QW94QwlhCWlTeC3gpKWZ6sT9CIljxN8n55ikbHyDkax_hJSM9RMkJvsx3YLXTGO-xrDNjpPW4txAZw9NugNK59wI23Wm0tBLzR0GDdmg6-DFj8Hvy--xjQhVthcBWewwrXxjbxAp3VYKO-_JsT9Po0W0-fk-XLfDF9XCYqFaJL8orziqaKQqa5qCu2KQueKp7rXAieFjrPaUmrUjAQtGYEGMmzsheAVEEBIp2g7HBXBR9j0LVsg2kgfEtK5NCPHOTlIC8Flb_9yHWPXR-wFqICWwdwysQjm6WCl4z3sYdDTPcKO6ODjMpop3RlgladrLz5_88PVAF51A |
CODEN | JCRGAE |
CitedBy_id | crossref_primary_10_1016_0040_6090_93_90238_K crossref_primary_10_1134_1_1187407 crossref_primary_10_1016_S0022_0248_96_01116_5 crossref_primary_10_1016_0022_0248_95_80068_N crossref_primary_10_1016_S0079_6727_96_00002_X crossref_primary_10_1088_0034_4885_61_1_001 crossref_primary_10_1143_JJAP_33_688 crossref_primary_10_1143_JJAP_33_90 crossref_primary_10_1143_JJAP_36_L743 crossref_primary_10_1063_5_0029138 crossref_primary_10_1016_j_apsusc_2004_09_119 crossref_primary_10_1016_S0022_0248_97_00080_8 crossref_primary_10_1143_JJAP_36_L1625 crossref_primary_10_1016_0022_0248_95_80071_J crossref_primary_10_1557_PROC_482_337 crossref_primary_10_1063_1_1450255 crossref_primary_10_1063_1_355781 crossref_primary_10_1557_PROC_300_447 crossref_primary_10_1063_1_353906 crossref_primary_10_1016_S0040_6090_98_01671_X crossref_primary_10_1557_PROC_595_F99W3_30 crossref_primary_10_1016_j_spmi_2005_03_004 crossref_primary_10_1143_JJAP_33_L1056 crossref_primary_10_1063_1_1145365 crossref_primary_10_1143_JJAP_34_1153 crossref_primary_10_1016_S0038_1101_96_00168_2 crossref_primary_10_1063_1_121955 crossref_primary_10_1002_1521_3951_200111_228_1_21__AID_PSSB21_3_0_CO_2_R crossref_primary_10_1557_S1092578300004257 crossref_primary_10_7567_APEX_11_081001 crossref_primary_10_1557_PROC_242_395 crossref_primary_10_1088_0268_1242_17_8_302 crossref_primary_10_1063_1_355176 crossref_primary_10_1134_1_1787109 crossref_primary_10_1149_2162_8777_ac4d80 crossref_primary_10_1016_0022_0248_95_80069_O crossref_primary_10_1016_0022_0248_94_90004_3 crossref_primary_10_1002_pssa_200982638 crossref_primary_10_1016_j_apsusc_2014_01_191 crossref_primary_10_1021_cm950108r crossref_primary_10_1016_S0022_0248_96_01019_6 crossref_primary_10_1088_0022_3727_31_20_001 crossref_primary_10_1016_0022_0248_95_01067_X crossref_primary_10_1016_0927_796X_94_00175_8 crossref_primary_10_1039_C4MH00049H crossref_primary_10_1016_S0038_1098_99_00108_8 crossref_primary_10_1063_1_1146517 crossref_primary_10_1364_OL_18_001843 crossref_primary_10_1016_S0040_6090_03_01097_6 crossref_primary_10_1063_1_118927 crossref_primary_10_1116_1_581129 crossref_primary_10_1063_1_1595135 crossref_primary_10_1016_0022_0248_94_00521_4 crossref_primary_10_1557_PROC_282_599 crossref_primary_10_1557_PROC_449_1067 crossref_primary_10_1016_0022_0248_94_90979_2 crossref_primary_10_1116_1_4816932 crossref_primary_10_1016_S0022_0248_01_02083_8 crossref_primary_10_1016_S0022_0248_99_00759_9 crossref_primary_10_1016_S0038_1101_98_00144_0 crossref_primary_10_1063_1_357293 crossref_primary_10_1049_ip_opt_20030030 crossref_primary_10_1103_PhysRevB_73_045337 crossref_primary_10_1557_PROC_482_325 |
Cites_doi | 10.1063/1.341326 10.1063/1.100870 10.1088/0022-3727/15/7/006 10.1116/1.582496 10.1007/BF02651400 10.1016/0025-5408(70)90028-0 10.1063/1.322064 10.1063/1.1654051 10.1143/JJAP.28.L1641 10.1063/1.344181 10.1063/1.1742945 10.1049/el:19840729 |
ContentType | Journal Article Conference Proceeding |
Copyright | 1991 1993 INIST-CNRS |
Copyright_xml | – notice: 1991 – notice: 1993 INIST-CNRS |
DBID | IQODW AAYXX CITATION |
DOI | 10.1016/0022-0248(91)91125-T |
DatabaseName | Pascal-Francis CrossRef |
DatabaseTitle | CrossRef |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering Chemistry Physics |
EISSN | 1873-5002 |
EndPage | 1028 |
ExternalDocumentID | 10_1016_0022_0248_91_91125_T 4397827 002202489191125T |
GroupedDBID | --K --M -~X .~1 0R~ 1B1 1RT 1~. 1~5 29K 4.4 457 4G. 53G 5GY 5VS 7-5 71M 8P~ 9JN AABNK AACTN AAEDT AAEDW AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO ABFNM ABJNI ABMAC ABNEU ABXDB ABYKQ ACDAQ ACFVG ACGFS ACIWK ACNNM ACRLP ADBBV ADEZE ADIYS ADMUD AEBSH AEKER AENEX AFFNX AFKWA AFTJW AGHFR AGUBO AGYEJ AHHHB AI. AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BBWZM BKOJK BLXMC CS3 D-I DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HMV HVGLF HZ~ IHE J1W KOM M24 M38 M41 MO0 N9A NDZJH O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SPG SSQ SSZ T5K TN5 VH1 WUQ XPP ZMT ~02 ~G- 08R ABPIF ABPTK IQODW AAXKI AAYXX ADVLN AFJKZ AKRWK CITATION |
ID | FETCH-LOGICAL-c399t-5d77d13c1a4e79fd2b8673c75e599736e55181d892a91f20a20548000a3ca6a93 |
ISSN | 0022-0248 |
IngestDate | Thu Sep 26 19:06:43 EDT 2024 Sun Oct 22 16:04:37 EDT 2023 Fri Feb 23 02:29:48 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 1 |
Keywords | Crystal growth Plasma Gallium Nitrides Indium Nitrides Molecular beam condensation Epitaxy Wurtzite structure Instrumentation Experimental study Inorganic compound Thin film |
Language | English |
License | CC BY 4.0 |
LinkModel | OpenURL |
MeetingName | Molecular beam epitaxy 1990 : [selected papers], La Jolla, CA, USA, 27-31 August 1990 |
MergedId | FETCHMERGED-LOGICAL-c399t-5d77d13c1a4e79fd2b8673c75e599736e55181d892a91f20a20548000a3ca6a93 |
PageCount | 5 |
ParticipantIDs | crossref_primary_10_1016_0022_0248_91_91125_T pascalfrancis_primary_4397827 elsevier_sciencedirect_doi_10_1016_0022_0248_91_91125_T |
PublicationCentury | 1900 |
PublicationDate | 1991-05-01 |
PublicationDateYYYYMMDD | 1991-05-01 |
PublicationDate_xml | – month: 05 year: 1991 text: 1991-05-01 day: 01 |
PublicationDecade | 1990 |
PublicationPlace | Amsterdam |
PublicationPlace_xml | – name: Amsterdam |
PublicationTitle | Journal of crystal growth |
PublicationYear | 1991 |
Publisher | Elsevier B.V Elsevier |
Publisher_xml | – name: Elsevier B.V – name: Elsevier |
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SSID | ssj0001610 |
Score | 1.6440604 |
Snippet | An RF plasma source has been integrated into a molecular beam epitaxial system for growth of nitride films. Using an optical detector on the source, the... |
SourceID | crossref pascalfrancis elsevier |
SourceType | Aggregation Database Index Database Publisher |
StartPage | 1024 |
SubjectTerms | Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Vacuum deposition |
Title | Evaluation of a new plasma source for molecular beam epitaxial growth of InN and GaN films |
URI | https://dx.doi.org/10.1016/0022-0248(91)91125-T |
Volume | 111 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Pb9MwFLZKJwRoByhDDDbkAwdQlWLnl-3jtBU6CmVCnTpxiew4AQ7tpjVI_Pjn9xw7TgZFE1yiKFXiKu_Le5_t972H0HMuSR7lNA0UkzqIQwVnoWIBBFclEkE5YUY7_H6WTk7jt2fJWa_3q6suqdQo_7lRV_I_VoVrYFejkv0Hy_qHwgU4B_vCESwMxz9tvDHUdPhkfvljbZSNn2FiXX3pQmHsK3pbNSQwadM9er2UQ7t2X-caLptGuUNVyOWwMO1Evn_1D7Sak1m92fBGzkxBp6Xn45MP0zqrcjFqlQ3vxuCujw_q1MCTUbv9tBgf18kXRyPX10s7ER5tM_zsQpiL2l3HCnNaUx7NhhXrSzmLgoSQ687WuVaHKqfwsc4TuE7cCcSG-mx08na9wQ8JTFyA14e_CWQtqNrA1mzm_xbvfBai4WI8ZLfQVhgBLvto62D6cTH1gRzIMGmKzZuBGuUlTV_5ay8EfekG_huz2b6Qa_jeStsopcNe5vfRTqvrxCceRg9Qr1gN0J3DpuffAN3rlKccoNt1enC-fog-tRDC5yWWGCCELYSwhRAGCGEPIWwghD2EsIWQuRUghAFCGCCEawjtoNPX4_nhJHBdOYIcyGwVJJoxTeH7lnHBRKlDxVMW5SwpEiFYlBamxh_VXIRS0DIkMiSmpiAhMsplKkX0CPVX56viMcKcR1qUvGSh1nGptYKZnuJC6pTmSsRkFwXNG80ubPGVrMlKNBbIjAUyQbPaAtl8F7HmtWeOQFpimAF0brhz_5qV_HAOI09u-P0putt-J3uoX11-K_aBrVbqmUPVFaYejP8 |
link.rule.ids | 310,311,315,786,790,795,796,23958,23959,25170,27955,27956 |
linkProvider | Library Specific Holdings |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=proceeding&rft.title=Journal+of+crystal+growth&rft.atitle=Evaluation+of+a+new+plasma+source+for+molecular+beam+epitaxial+growth+of+InN+and+GaN+films&rft.au=HOKE%2C+W.+E&rft.au=LEMONIAS%2C+P.+J&rft.au=WEIR%2C+D.+G&rft.date=1991-05-01&rft.pub=Elsevier&rft.issn=0022-0248&rft.eissn=1873-5002&rft.volume=111&rft.issue=1-4&rft.spage=1024&rft.epage=1028&rft_id=info:doi/10.1016%2F0022-0248%2891%2991125-t&rft.externalDBID=n%2Fa&rft.externalDocID=4397827 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0022-0248&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0022-0248&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0022-0248&client=summon |